公开(公告)号：WO2020099888A2

公开(公告)日：2020-05-22

申请号：PCT/GB2019/053244

申请日：2019-11-15

Applicant: EDWARDS LIMITED

Inventor： NORRINGTON, Michael John ,  STACH, Mark Robert ,  PETERS, Simon Nicholas ,  HARBER, Neil William ,  OSBORN, Kevin Frederick

IPC: B66F7/20 ,  B66F3/26

Abstract: A lifting apparatus (100) for lifting vacuum pumping and/or abatement equipment, the lifting apparatus comprising: a plurality of rams (110a-110d) for engaging with equipment; a plurality of pumps (130a-130d) for pumping fluid to the plurality of rams to cause the plurality of rams to move equipment engaged with the plurality of rams; and a plurality of valves (120a-120k) for controlling the flow of fluid between the plurality of rams and the plurality of pumps, wherein the plurality of rams are connected to the plurality of pumps via the plurality of valves, wherein the lifting apparatus is operable in a first mode in which the plurality of valves are configured such that each of the plurality of rams is in fluid communication with each other ram, and wherein the lifting apparatus is operable in a second mode in which the plurality of valves are configured such that each of the plurality of rams is fluidly isolated from each other ram.

公开(公告)号：WO2023007171A1

公开(公告)日：2023-02-02

申请号：PCT/GB2022/051991

申请日：2022-07-28

Applicant: EDWARDS LIMITED

Inventor： NORRINGTON, Michael John

IPC: F16L55/34 ,  F16L55/44 ,  F16L101/12 ,  F16L101/30

Abstract: A self-propelling pipe maintenance device and method of maintaining a pipe. The device comprising: two gripping elements separated by a propelling element. The two gripping elements each comprise a radially expandable body configured when pressurised to move between a radially compact state and a radially expanded state. The propelling element comprises a longitudinally expandable body configured when pressurised to move between a longitudinally compact state and a longitudinally expanded state. The device is connected to a pressure control apparatus configured to independently control a pressure within each of the expandable bodies to enable movement of the self-propelling device along a pipe.

公开(公告)号：WO2022229643A1

公开(公告)日：2022-11-03

申请号：PCT/GB2022/051079

申请日：2022-04-28

Applicant: EDWARDS LIMITED

Inventor： BAILEY, Christopher Mark ,  NORRINGTON, Michael John ,  PHILLIP, Stephen

IPC: H01L21/67

Abstract: A system comprising: a semiconductor processing tool (102) comprising a process chamber (108); a valve module (104) configured to receive a fluid from the process chamber (108) and to selectably direct a flow of said fluid; and a cooling apparatus (402) configured to supply a flow of a cooling fluid to the process chamber (108); wherein the valve module (104) and the cooling apparatus (402) are arranged in a stacked configuration.

公开(公告)号：WO2020136370A1

公开(公告)日：2020-07-02

申请号：PCT/GB2019/053683

申请日：2019-12-23

Applicant: EDWARDS LIMITED

Inventor： NORRINGTON, Michael John ,  PETERS, Simon Nicholas ,  HARBER, Neil William ,  OSBORN, Kevin Frederick

IPC: G01M3/24

Abstract: A method of detecting a leak point (24) on a fluid line (18), the method comprising: while maintaining the fluid line (18) in a state in which the fluid line (18) is substantially filled with air at ambient pressure, emitting ultrasound (25) into the fluid line (18) using an ultrasound emitter (20); and detecting, using an ultrasound detector (22), that the emitted ultrasound (25) is exiting the fluid line (18) at the leak point (24) on the fluid line (18).

公开(公告)号：WO2020099888A3

公开(公告)日：2020-05-22

申请号：PCT/GB2019/053244

申请日：2019-11-15

Applicant: EDWARDS LIMITED

Inventor： NORRINGTON, Michael John ,  STACH, Mark Robert ,  PETERS, Simon Nicholas ,  HARBER, Neil William ,  OSBORN, Kevin Frederick

IPC: B66F7/20 ,  B66F3/26

Abstract: A lifting apparatus (100) for lifting vacuum pumping and/or abatement equipment, the lifting apparatus comprising: a plurality of rams (110a-110d) for engaging with equipment; a plurality of pumps (130a-130d) for pumping fluid to the plurality of rams to cause the plurality of rams to move equipment engaged with the plurality of rams; and a plurality of valves (120a-120k) for controlling the flow of fluid between the plurality of rams and the plurality of pumps, wherein the plurality of rams are connected to the plurality of pumps via the plurality of valves, wherein the lifting apparatus is operable in a first mode in which the plurality of valves are configured such that each of the plurality of rams is in fluid communication with each other ram, and wherein the lifting apparatus is operable in a second mode in which the plurality of valves are configured such that each of the plurality of rams is fluidly isolated from each other ram.

公开(公告)号：WO2022229642A1

公开(公告)日：2022-11-03

申请号：PCT/GB2022/051078

申请日：2022-04-28

Applicant: EDWARDS LIMITED

Inventor： NORRINGTON, Michael John ,  PHILLIP, Stephen

IPC: F04B37/14 ,  F04B41/06 ,  C23C16/52 ,  F04C25/02

Abstract: A valve module (104) for a vacuum pumping system, comprising: a plurality of inlets (110) for receiving a fluid; a plurality of pressure sensors (122), each configured to measure a fluid pressure associated with a respective inlet (110); a first fluid line manifold (114); a second fluid line manifold (116); a plurality of multifurcating conduits (112), each connecting a respective inlet (110) to both the first and second fluid line manifolds (114, 116); a plurality of valves (124, 126) disposed in the multifurcating conduits (112); and a valve controller (128) coupled to the sensors (122) and the valves (124, 126); wherein the valve controller (128) is configured to control, based on pressure measurements from the sensors (122), the valves (124, 126) such that a fluid flow through a multifurcating conduit (112) is directed to either only the first fluid line manifold (114) or only the second fluid line manifold (116).

公开(公告)号：WO2022112755A1

公开(公告)日：2022-06-02

申请号：PCT/GB2021/053044

申请日：2021-11-24

Applicant: EDWARDS LIMITED

Inventor： NORRINGTON, Michael John ,  BARLOW, Steven Graham

IPC: G01L9/00 ,  G01L19/12 ,  G01L21/00 ,  F04D15/00

Abstract: A pressure sensing unit, vacuum system and method are disclosed. The pressure sensing unit comprises: an inlet for connecting to a system to be monitored; a sensor configured to detect pressure, the sensor being in fluid communication with the inlet and determining circuitry configured to receive signals indicative of the detected pressure from the sensor. The determining circuitry is configured to determine a pressure and a rate of change of pressure over time from the signals. The determining circuitry comprises an output for outputting signals indicative of the determined pressure and the rate of change of pressure.