MONITORING AND CONTROL OF A SEMICONDUCTOR MANUFACTURING PROCESS

    公开(公告)号:WO2022263713A1

    公开(公告)日:2022-12-22

    申请号:PCT/FI2022/050389

    申请日:2022-06-06

    Applicant: ELISA OYJ

    Abstract: Monitoring of a semiconductor manufacturing process. Wafer measurement data is obtained (301); Zernike polynomials are fitted (302) to the wafer measurement data to obtain representation of respective wafermap patterns; a knowledgebase of wafermap patterns is built (303) based on the respective coefficients of the Zernike polynomials; the wafermap patterns of the knowledgebase are grouped (304) to wafermap pattern groups based on the respective coefficients of the Zernike polynomials; and at least some of the wafermap pattern groups of the knowledgebase and the respective coefficients of the Zernike polynomials are used (305) for analyzing new wafer measurement data for the purpose of monitoring the semiconductor manufacturing process.

    MONITORING AND CONTROL OF A SEMICONDUCTOR MANUFACTURING PROCESS

    公开(公告)号:WO2022117912A1

    公开(公告)日:2022-06-09

    申请号:PCT/FI2021/050784

    申请日:2021-11-18

    Applicant: ELISA OYJ

    Abstract: Monitoring and control of a semiconductor manufacturing process. Candidate rules for the statistical process control of the semiconductor manufacturing process are automatically generated based on production data and quality data; the candidate rules are submitted for evaluation; and one or more of the candidate rules are conditionally taken into use in the statistical process control of the semiconductor manufacturing process.

    AUTOMATED EVALUATION OF EFFECTS OF CHANGES IN COMMUNICATIONS NETWORKS

    公开(公告)号:WO2021250314A1

    公开(公告)日:2021-12-16

    申请号:PCT/FI2021/050403

    申请日:2021-06-02

    Applicant: ELISA OYJ

    Abstract: A computer implemented method for evaluating effect of a change in a communications network. The method is performed by receiving (301) a first set of performance indicator values comprising performance indicator values measured over a first period of time before the change in the communications network;receiving (302) a second set of performance indicator values comprising performance indicator values measured over a second period of time after the change in the communications network; comparing the first set and the second set to evaluate the effect of the change; determining (304) a performance threshold based on the performance indicator values of the first set; determining (305) a first performance ratio value based on the performance indicator values of the first set and the performance threshold; determining (306) a second performance ratio value based on the performance indicator values of the second set and the performance threshold; and providing (307) output based on the first performance ratio value and the second performance ratio value.

    MONITORING OF TARGET SYSTEM, SUCH AS COMMUNICATION NETWORK OR INDUSTRIAL PROCESS

    公开(公告)号:WO2021250313A1

    公开(公告)日:2021-12-16

    申请号:PCT/FI2021/050402

    申请日:2021-06-02

    Applicant: ELISA OYJ

    Abstract: A computer implemented method of monitoring and controlling a target system, such as a communication network or an industrial process. The method includes receiving (301) information about anomalies in operation of the target system detected by an automated anomaly detection mechanism; automatically determining (302) certainty characteristics of the detected anomalies; submitting (303) detected anomalies to expert evaluation in priority order determined based on the certainty characteristics; and adjusting (304, 305) the determination of certainty characteristics of the detected anomalies and/or the automated anomaly detection mechanism based on results of the expert evaluation.

    CELL OVERLAP ANALYSIS
    6.
    发明申请

    公开(公告)号:WO2021111032A1

    公开(公告)日:2021-06-10

    申请号:PCT/FI2020/050788

    申请日:2020-11-23

    Applicant: ELISA OYJ

    Abstract: A computer implemented method of cell overlap analysis of a communication network.The method comprises determining (302, 303) coverage area of a first and a second cell of the communication network, wherein determination of the coverage area of a cell is based on user distribution in the respective cell; determining (304) intersecting area as an area where the determined coverage area of the first cell and the determined coverage area of the second cell overlap; and determining (305) a first impact value reflecting impact of the overlap on the first cell as a ratio of the determined intersecting area and the determined coverage area of the first cell.

    MANAGEMENT OF PREDICTIVE MODELS OF A COMMUNICATION NETWORK

    公开(公告)号:WO2021089911A1

    公开(公告)日:2021-05-14

    申请号:PCT/FI2020/050704

    申请日:2020-10-26

    Applicant: ELISA OYJ

    Abstract: A computer implemented method of managing a predictive model of a communication network, wherein the predictive model is configured to identify and correct forthcoming failures in network devices based on data collected from the network devices. The method includes allocating (302) network devices of the communication network into first and second clusters, disabling (303) the predictive model in the first cluster, enabling (304) the predictive model in the second cluster, collecting (305) data from the first cluster, repeating (306) said disabling, enabling and collecting with a new allocation of first and second clusters to continuously collect data with different allocation of first and second clusters, and outputting (307) at least the data collected from the first cluster for analysis of the predictive model.

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