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公开(公告)号:WO2022263713A1
公开(公告)日:2022-12-22
申请号:PCT/FI2022/050389
申请日:2022-06-06
Applicant: ELISA OYJ
Inventor: YLÄ-JARKKO, Kalle , HEIKKILÄ, Rasmus , LISKI, Antti , HILTUNEN, Eero , SALMENKAITA, Jukka-Pekka
Abstract: Monitoring of a semiconductor manufacturing process. Wafer measurement data is obtained (301); Zernike polynomials are fitted (302) to the wafer measurement data to obtain representation of respective wafermap patterns; a knowledgebase of wafermap patterns is built (303) based on the respective coefficients of the Zernike polynomials; the wafermap patterns of the knowledgebase are grouped (304) to wafermap pattern groups based on the respective coefficients of the Zernike polynomials; and at least some of the wafermap pattern groups of the knowledgebase and the respective coefficients of the Zernike polynomials are used (305) for analyzing new wafer measurement data for the purpose of monitoring the semiconductor manufacturing process.
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公开(公告)号:WO2021234216A1
公开(公告)日:2021-11-25
申请号:PCT/FI2021/050337
申请日:2021-05-07
Applicant: ELISA OYJ
Inventor: SALMENKAITA, Jukka-Pekka , LUNDÉN, Petteri
IPC: H04L12/24 , G06F16/21 , G06K9/62 , G06N20/00 , G06F16/332
Abstract: A computer implemented method of monitoring and controlling a communication network. Information about results of experts' evaluation of machine generated suggestions is collected (304, 309), wherein the machine generated suggestions relate to making changes in the communication network; building and updating expert profiles based on the collected information; and using the expert profiles for processing further machine generated suggestions.
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公开(公告)号:WO2022117912A1
公开(公告)日:2022-06-09
申请号:PCT/FI2021/050784
申请日:2021-11-18
Applicant: ELISA OYJ
Inventor: SALMENKAITA, Jukka-Pekka , HEIKKILÄ, Rasmus
IPC: G05B19/418 , H01L21/67
Abstract: Monitoring and control of a semiconductor manufacturing process. Candidate rules for the statistical process control of the semiconductor manufacturing process are automatically generated based on production data and quality data; the candidate rules are submitted for evaluation; and one or more of the candidate rules are conditionally taken into use in the statistical process control of the semiconductor manufacturing process.
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公开(公告)号:WO2021250314A1
公开(公告)日:2021-12-16
申请号:PCT/FI2021/050403
申请日:2021-06-02
Applicant: ELISA OYJ
Inventor: HOLMBACKA, Simon , SALMENKAITA, Jukka-Pekka
IPC: H04L12/24 , H04L41/0813 , H04L41/5009
Abstract: A computer implemented method for evaluating effect of a change in a communications network. The method is performed by receiving (301) a first set of performance indicator values comprising performance indicator values measured over a first period of time before the change in the communications network;receiving (302) a second set of performance indicator values comprising performance indicator values measured over a second period of time after the change in the communications network; comparing the first set and the second set to evaluate the effect of the change; determining (304) a performance threshold based on the performance indicator values of the first set; determining (305) a first performance ratio value based on the performance indicator values of the first set and the performance threshold; determining (306) a second performance ratio value based on the performance indicator values of the second set and the performance threshold; and providing (307) output based on the first performance ratio value and the second performance ratio value.
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公开(公告)号:WO2021250313A1
公开(公告)日:2021-12-16
申请号:PCT/FI2021/050402
申请日:2021-06-02
Applicant: ELISA OYJ
Inventor: SALMENKAITA, Jukka-Pekka , HEIKKILÄ, Rasmus
IPC: H04L12/24 , H04L41/0636 , H04L41/0686 , H04L41/069
Abstract: A computer implemented method of monitoring and controlling a target system, such as a communication network or an industrial process. The method includes receiving (301) information about anomalies in operation of the target system detected by an automated anomaly detection mechanism; automatically determining (302) certainty characteristics of the detected anomalies; submitting (303) detected anomalies to expert evaluation in priority order determined based on the certainty characteristics; and adjusting (304, 305) the determination of certainty characteristics of the detected anomalies and/or the automated anomaly detection mechanism based on results of the expert evaluation.
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公开(公告)号:WO2021111032A1
公开(公告)日:2021-06-10
申请号:PCT/FI2020/050788
申请日:2020-11-23
Applicant: ELISA OYJ
Inventor: LUNDÉN, Petteri , SALMENKAITA, Jukka-Pekka , CHIS, Adriana , RENDON, Mateo
Abstract: A computer implemented method of cell overlap analysis of a communication network.The method comprises determining (302, 303) coverage area of a first and a second cell of the communication network, wherein determination of the coverage area of a cell is based on user distribution in the respective cell; determining (304) intersecting area as an area where the determined coverage area of the first cell and the determined coverage area of the second cell overlap; and determining (305) a first impact value reflecting impact of the overlap on the first cell as a ratio of the determined intersecting area and the determined coverage area of the first cell.
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公开(公告)号:WO2021089911A1
公开(公告)日:2021-05-14
申请号:PCT/FI2020/050704
申请日:2020-10-26
Applicant: ELISA OYJ
Inventor: SALMENKAITA, Jukka-Pekka , PELTONEN, Teemu
IPC: H04L12/24
Abstract: A computer implemented method of managing a predictive model of a communication network, wherein the predictive model is configured to identify and correct forthcoming failures in network devices based on data collected from the network devices. The method includes allocating (302) network devices of the communication network into first and second clusters, disabling (303) the predictive model in the first cluster, enabling (304) the predictive model in the second cluster, collecting (305) data from the first cluster, repeating (306) said disabling, enabling and collecting with a new allocation of first and second clusters to continuously collect data with different allocation of first and second clusters, and outputting (307) at least the data collected from the first cluster for analysis of the predictive model.
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