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    CMP RETAINING RING
    1.
    发明申请
    CMP RETAINING RING 审中-公开
    CMP保持环

    公开(公告)号：WO2006127780A2

    公开(公告)日：2006-11-30

    申请号：PCT/US2006/020036

    申请日：2006-05-24

    Applicant: ENTEGRIS, INC. ,  BURNS, John ,  SMITH, Mark, V. ,  FORBES, Martin, L.

    Inventor： BURNS, John ,  SMITH, Mark, V. ,  FORBES, Martin, L.

    IPC: A61N1/00

    CPC classification number: B24B37/32 ,  Y10T29/49826

    Abstract: An improved chemical mechanical polishing retaining ring. A representative embodiment comprises a base portion made from a wear-resistant plastic material, and an upper portion, or backbone portion, made from a stiffer and more wear resistant material. One of the base or backbone portion is preferably overmolded onto the other. The base portion can be generally defined by a flat pad-contacting surface, an outer surface, and an inner surface. The base portion can additionally include channels extending from the outer surface to the inner surface to facilitate transfer of slurry to and from the substrate to be polished during the process. One or both of the base portion or backbone portion further includes a plurality of circular ribs that serve to create additional bonding surface with the overmolded material. The retaining ring may additionally includes a plurality of bosses with threaded insert holes by which the retaining ring is attached to a chemical mechanical polishing system.

    Abstract translation: 改进的化学机械抛光保持环。 代表性的实施例包括由耐磨塑料材料制成的基部，以及由更硬和更耐磨的材料制成的上部或主体部分。 基部或骨架部分中的一个优选地包覆成型在另一个上。 基部一般可以由平垫接触表面，外表面和内表面限定。 基部可以另外包括从外表面延伸到内表面的通道，以便于在该过程期间将浆料转移到待抛光的基底上和从基底转移。 基部或骨架部分中的一个或两个还包括多个圆形肋，其用于与包覆成型的材料产生附加的粘合表面。 保持环可以另外包括具有螺纹插入孔的多个凸台，保持环通过该凸起附接到化学机械抛光系统。

    WAFER CONTAINER WITH DOOR ACTUATED WAFER RESTRAINT
    2.
    发明申请
    WAFER CONTAINER WITH DOOR ACTUATED WAFER RESTRAINT 审中-公开
    带门启动的水龙头限位器

    公开(公告)号：WO2005055279A2

    公开(公告)日：2005-06-16

    申请号：PCT/US2004/038452

    申请日：2004-11-16

    Applicant: ENTEGRIS, INC. ,  BURNS, John ,  FULLER, Matthew, A. ,  KING, Jeffery, J. ,  FORBES, Martin, L. ,  SMITH, Mark, V.

    Inventor： BURNS, John ,  FULLER, Matthew, A. ,  KING, Jeffery, J. ,  FORBES, Martin, L. ,  SMITH, Mark, V.

    IPC: H01L

    CPC classification number: H01L21/67353 ,  B65D51/26 ,  B65D2251/04 ,  H01L21/67369 ,  H01L21/67373 ,  H01L21/67383

    Abstract: A container for holding a wafer includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an opposing open front defined by a door frame. A door is sealingly engagable in the door frame to close the open front. The container further includes wafer restraint means in the enclosure including fixed wafer restraint means and operable wafer restraint means. The operable wafer restraint means is selectively positionable by engaging and disengaging the door from the door frame, and is positioned so to enable insertion or removal of a wafer from the container when the door is disengaged from the door frame and positioned so as to cooperate with the fixed wafer restraint means to restrain the wafer in the container when the door is engaged in the door frame.

    Abstract translation: 用于保持晶片的容器包括具有顶部，底部，一对相对侧的外壳部分，由门框限定的后部和相对的开放前部。 门在门框内密封接合，以封闭开放的前部。 容器还包括在外壳中的晶片限制装置，其包括固定的晶片限制装置和可操作的晶片约束装置。 可操作的晶片约束装置通过使门与门框架接合和分离而被选择性地定位，并且被定位成当门从门框架脱离时被定位成使得能够从容器插入或移除晶片，以便与 所述固定晶片限制装置用于当门接合在门框中时将晶片限制在容器中。

    FRONT OPENING LARGE SUBSTRATE CONTAINER
    5.
    发明申请
    FRONT OPENING LARGE SUBSTRATE CONTAINER 审中-公开
    前开大型基板容器

    公开(公告)号：WO2012088172A2

    公开(公告)日：2012-06-28

    申请号：PCT/US2011/066282

    申请日：2011-12-20

    Applicant: ENTEGRIS, INC. ,  FORBES, Martin, L. ,  FULLER, Matthew, A. ,  BURNS, John

    Inventor： FORBES, Martin, L. ,  FULLER, Matthew, A. ,  BURNS, John

    IPC: H01L21/673 ,  B65D85/38 ,  B65D85/48 ,  B65D85/86 ,  G02F1/13

    CPC classification number: H01L21/67373 ,  H01L21/67386

    Abstract: A flat panel substrate container provides a microenvironment for safely storing and allowing horizontal removal through a front door. In an embodiment of the invention, a robust shelf system has a plurality of stacked shelves that have a cantilevered state with the door open and a non-cantilevered state with the door closed. The container may be generally rectilinear in shape and conforming to the shape of the substrate panels. The container has an open front with a closed top wall, closed bottom wall, closed left side wall, closed right side wall, and closed back side wall. A plurality of shelves are secured to the back side wall and extend forwardly in a cantilevered fashion. In an embodiment of the invention, the shelves may be generally elongate slender shelf members formed of aluminum extrusions or assemblies that are arranged in two columns with a pair of such members provided for each substrate and defining a slot. Also inwardly extending edge supports are provided at the left side wall and right side wall for edge support of the substrates. In an embodiment of the invention, the elongate shelf members each have one of a pair of male and female portion that join as the door is closed to effectively "uncantilever" the elongate shelf members as the door closes the open front. All of the shelf members and the substrates thereon may be fixed into position at the end opposite the cantilevered connection to the container portion. The container may have a feature for overhead transport, such as lifting brackets, static dissipation features, and latching features.

    Abstract translation: 平板基板容器提供了用于安全存储并允许通过前门水平移除的微环境。 在本发明的一个实施例中，坚固的搁架系统具有多个堆叠的搁架，其具有门打开时的悬臂状态和关闭门的非悬臂状态。 容器的形状通常可以是直线形的并且与基板面板的形状一致。 该容器具有敞开的前部，其具有封闭的顶壁，封闭的底壁，封闭的左侧壁，封闭的右侧壁和封闭的后侧壁。 多个搁板固定在后侧壁上并以悬臂方式向前延伸。 在本发明的一个实施例中，搁架可以是大致细长的细长搁架构件，其由铝挤压件或以两列布置的组件形成，并且为每个基底设置一对这样的构件并且限定狭槽。 同样向内延伸的边缘支撑件设置在左侧壁和右侧壁处以用于基板的边缘支撑。 在本发明的一个实施例中，细长搁架构件每个都具有一对阳部和阴部中的一个，当门关闭时它们连接在一起以有效地“非悬浮” 当门关闭开放的前部时，细长的搁架构件。 所有搁架构件及其上的基板可以在与容器部分的悬臂式连接相对的端部固定就位。 该容器可能具有用于架空运输的功能，例如提升支架，静电耗散功能和锁定功能。

    WAFER CONTAINER WITH SECONDARY WAFER RESTRAINT SYSTEM
    6.
    发明申请
    WAFER CONTAINER WITH SECONDARY WAFER RESTRAINT SYSTEM 审中-公开
    具有二次波浪限制系统的滤波器

    公开(公告)号：WO2006058089A2

    公开(公告)日：2006-06-01

    申请号：PCT/US2005/042486

    申请日：2005-11-23

    Applicant: ENTEGRIS, INC. ,  BURNS, John ,  FULLER, Matthew, A. ,  KING, Jeffery, J. ,  FORBES, Martin, L. ,  SMITH, Mark, V.

    Inventor： BURNS, John ,  FULLER, Matthew, A. ,  KING, Jeffery, J. ,  FORBES, Martin, L. ,  SMITH, Mark, V.

    IPC: B65D85/00

    CPC classification number: H01L21/67369

    Abstract: A wafer container providing improved wafer restraint during physical shock events. In embodiments of the invention, a secondary wafer restraint structure defining a plurality of notches is interposed between opposing wafer restraint members on the door of the container. The notches may be defined by one or more converging edges or surfaces meeting at a junction. The junctions are positioned so as to align with the wafer receiving portions of each opposing pair of wafer restraint member so that when the door is fully sealingly engaged with the enclosure of the container, the edge of the wafer is contacting the junction. In this position, any vertical movement of the wafer due to shock imparted to the container causes the wafer to contact the converging surfaces or edges, thereby limiting such movement. The positioning of the secondary wafer restraint structure between and proximate opposing fingers of the primary wafer restraint limits deflection of the wafer between support points and thereby further inhibits the wafer from “jumping” out of the supports and cross-slotting.

    Abstract translation: 在物理冲击事件期间提供改进的晶片约束的晶片容器。 在本发明的实施例中，限定多个凹口的次晶片约束结构插入在容器的门上的相对的晶片约束部件之间。 切口可由一个或多个在会合处的会聚边缘或表面限定。 接合部被定位成与每个相对的一对晶片约束构件的晶片接收部分对准，使得当门与容器的外壳完全密封地接合时，晶片的边缘接触接合部。 在这个位置上，由于施加到容器上的冲击而导致的晶片的任何垂直移动导致晶片与会聚表面或边缘接触，从而限制了这种移动。 第二晶片约束结构在主晶片限制器的相对指状物之间和之间的定位限制了晶片在支撑点之间的偏转，从而进一步阻止晶片从支撑件“跳跃”出来并进行交叉开槽。

    WAFER CONTAINER AND DOOR WITH CAM LATCHING MECHANISM
    7.
    发明申请
    WAFER CONTAINER AND DOOR WITH CAM LATCHING MECHANISM 审中-公开
    具有凸轮锁紧机构的冷凝器和门

    公开(公告)号：WO2005055280A2

    公开(公告)日：2005-06-16

    申请号：PCT/US2004/038453

    申请日：2004-11-16

    Applicant: ENTEGRIS, INC. ,  BURNS, John ,  FULLER, Matthew, A. ,  KING, Jeffery, J. ,  FORBES, Martin, L. ,  SMITH, Mark, V.

    Inventor： BURNS, John ,  FULLER, Matthew, A. ,  KING, Jeffery, J. ,  FORBES, Martin, L. ,  SMITH, Mark, V.

    IPC: H01L

    CPC classification number: H01L21/67353 ,  H01L21/67373 ,  Y10T292/1049

    Abstract: A container for holding a single wafer includes a door with a latching mechanism having a cam with a pair of opposing wings extending laterally therefrom. The cam is selectively rotatably shiftable between a first favored position wherein the wings are completely within the door enclosure to enable the door to be engaged and disengaged from the door frame, and a second favored position wherein the wings extend laterally outward from the door enclosure so as to engage in the latch recesses in the door frame when the door is engaged in the door frame. The cam wings may include a ramped portion thereon for drawing the door into closer engagement in the door frame when the cam is rotated from the first favored position to the second favored position. Also, the latching mechanism may further include a spring disposed to provide a biasing force for urging the latching mechanism toward each of the first and second favored positions, and soft-stop dampening springs for decelerating the cam in a controlled fashion at the first and second favored positions and for absorbing vibrations resulting from the collision of the cam with a fixed stop on the door chassis.

    Abstract translation: 用于保持单个晶片的容器包括具有闩锁机构的门，所述闩锁机构具有凸轮，所述凸轮具有从其横向延伸的一对相对的翼。 凸轮可选择性地可旋转地在第一有利位置之间移动，其中翼完全在门外壳内，以使门能够与门框接合和脱离，以及第二优选位置，其中翼从门外壳横向向外延伸， 当门接合在门框中时，接合门框中的闩锁凹部。 凸轮翼可以包括其上的斜坡部分，用于当凸轮从第一优选位置旋转到第二优选位置时，将门拉近门框中更紧密的接合。 此外，闩锁机构还可以包括设置成提供用于将闩锁机构朝向第一和第二受惠位置中的每一个推动的偏置力的弹簧，以及用于在第一和第二位置以受控的方式减速凸轮的软停止润滑弹簧 有利的位置和吸收由于凸轮与门机箱上的固定挡块碰撞而产生的振动。

    WAFER CONTAINER WITH TUBULAR ENVIRONMENTAL CONTROL COMPONENTS
    8.
    发明申请
    WAFER CONTAINER WITH TUBULAR ENVIRONMENTAL CONTROL COMPONENTS 审中-公开

    公开(公告)号：WO2009114798A4

    公开(公告)日：2009-09-17

    申请号：PCT/US2009/037143

    申请日：2009-03-13

    Applicant: ENTEGRIS, INC. ,  WATSON, James, A. ,  BURNS, John ,  FORBES, Martin, L. ,  FULLER, Matthew, A. ,  SMITH, Mark, V.

    Inventor： WATSON, James, A. ,  BURNS, John ,  FORBES, Martin, L. ,  FULLER, Matthew, A. ,  SMITH, Mark, V.

    IPC: H01L21/673 ,  B65D85/38 ,  B65D85/86 ,  B65D81/18

    Abstract: A wafer container utilizes a rigid polymer tubular tower with slots and a "getter" therein for absorbing and filtering moisture and vapors within the wafer container. The tower preferably utilizes a purge grommet at the base of the container and may have a check valve therein to control the flow direction of gas (including air) into and out of the container and with respect to the tower. The tower is sealingly connected with the grommet. The tower may have a getter media piece rolled in an elongate circular fashion forming or shaped as a tube and disposed within the tower and may have axially extending. The media can provide active and/or passive filtration as well as having capabilities to be recharged. Front opening wafer containers for 300mm sized wafers generally have a pair of recesses on each of the left and right side in the inside rear of the container portions. These recesses are preferably utilized for elongate towers, such towers extending substantially from a bottom wafer position to a top wafer position. In alternative embodiment, a tubular shape of getter material is exposed within the front opening container without containment of the getter other than at the ends. The tubular getter form is preferably supported at discrete locations to maximize exposure to the internal container environment. A blocker member can selectively close the apertures. An elastomeric cap can facilitate securement of the tubular component in the container portion.

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