CALIPER SENSOR AND METHOD USING MID-INFRARED INTERFEROMETRY
    1.
    发明申请
    CALIPER SENSOR AND METHOD USING MID-INFRARED INTERFEROMETRY 审中-公开
    CALIPER传感器和使用中红外干涉法的方法

    公开(公告)号:WO2015085396A1

    公开(公告)日:2015-06-18

    申请号:PCT/CA2014/000835

    申请日:2014-11-18

    Abstract: Non-contacting caliper measurements of free standing sheets such as porous polymer and paper detect mid-IR interferometric fringes created by the reflection of light from the top and bottom surfaces of the sheet. The technique includes directing a laser beam at a selected angle of incidence onto a single spot on the exposed outer surface wherein the laser beam comprises radiation having a wavelength in the 3-50 micron range and scanning the laser beam through a selected angle range as the laser beam is directed onto the exposed outer surface and measuring the intensity of an interference pattern that forms from the superposition of radiation that is reflected from the exposed outer surface and from the inner surface. Thickness can be extracted from the fringe separation in the interference pattern. Rotating and focusing elements ensure that the spot position on the sheet remains the same while varying the incident angle.

    Abstract translation: 通过从片材的顶部和底部表面反射的光产生的自由基片材(如多孔聚合物和纸张)的非接触卡尺测量检测中红外干涉条纹。 该技术包括将激光束定向到暴露的外表面上的单个点上的入射角,其中激光束包括波长在3-50微米范围内的辐射,并且将激光束扫过选定的角度范围作为 激光束被引导到暴露的外表面上,并测量从暴露的外表面和内表面反射的辐射的叠加形成的干涉图案的强度。 可以从干涉图案中的边缘分离中提取厚度。 旋转和聚焦元件可确保纸张上的光点位置保持不变,同时改变入射角度。

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