公开(公告)号：WO2016149790A1

公开(公告)日：2016-09-29

申请号：PCT/CA2016/000073

申请日：2016-03-14

Applicant: HONEYWELL LIMITED/HONEYWELL LIMITEE

Inventor： TIXIER, Sebastien ,  HARAN, Franck, Martin

IPC: G01N21/17 ,  G01B11/06

CPC classification number: G01N21/8422 ,  G01B11/0625 ,  G01B11/0675 ,  G01G9/00 ,  G01G9/005 ,  G01J3/45 ,  G01N21/031 ,  G01N21/31 ,  G01N21/3559 ,  G01N21/3563 ,  G01N21/86 ,  G01N2021/3155 ,  G01N2021/8427 ,  G01N2021/8609 ,  G01N2201/061 ,  G01N2201/068

Abstract: Continuous on-line thin film measurements employ a sensor having a spectrometer for interferometric measurements and a stack of single channel detectors for adsorption measurements. The stack is separated from the spectrometer, which analyzes radiation that emerges (transmitted pass or reflected from) the film, whereas the stack analyzes radiation that has passed through the film multiple times. The spectrometer is (i) positioned directly opposite the source of radiation so that it detects transmitted radiation or (ii) disposed on the same side of the film as is the source of radiation so that the spectrometer detects radiation that is specularly reflected from the film. The sensor includes a broadband radiation source emitting visible to far infrared light which propagates through a measurement cell defined by reflective surfaces exhibiting Lambertian-type scattering. The sensor is capable of measuring thin plastic films with thicknesses down to 1 micron or less.

Abstract translation: 连续在线薄膜测量使用具有用于干涉测量的光谱仪的传感器和用于吸附测量的单通道检测器的堆叠。 堆叠与光谱仪分离，光谱仪分析出现（辐射通过或从膜反射）的辐射，而堆叠分析已经通过膜的辐射多次。 光谱仪是（i）与辐射源直接相对放置，以便其检测透射辐射，或（ii）设置在与辐射源相同的膜侧，使得光谱仪检测从膜的镜面反射的辐射 。 传感器包括向远红外光发射可见的宽带辐射源，其传播通过表现朗伯型散射的反射表面限定的测量单元。 传感器能够测量厚度低于1微米或更小的薄塑料薄膜。