公开(公告)号：WO2019067128A1

公开(公告)日：2019-04-04

申请号：PCT/US2018/048114

申请日：2018-08-27

申请人： INTEL CORPORATION

发明人： CHATTOPADHYAY, Rita ,  CHETTY, Mruthunjaya ,  DAVIS, Jeffrey ,  JI, Xiaozhong ,  COPE, Stephanie

IPC分类号： H01L21/67 ,  H01L21/66 ,  H01L21/677 ,  H01L21/02

CPC分类号： B25J9/1674 ,  B25J9/1602 ,  G01N19/08 ,  G05B19/418 ,  G05B23/024 ,  G05B23/0272 ,  G05B2219/37434 ,  G06Q10/0639

摘要： Methods, apparatus, systems, and articles of manufacture for monitoring robot health in manufacturing environments are described herein. An example system, to monitor health of a robot in a semiconductor wafer manufacturing facility, includes a sensor coupled to the robot. The sensor is to obtain a vibration signal representative of vibration of the robot. The example system also includes a health monitor extract a feature from the vibration signal, compare the feature to a threshold, and, in response to determining the feature satisfies the threshold, transmit an alert.