公开(公告)号：WO2004025848A1

公开(公告)日：2004-03-25

申请号：PCT/US2003/028593

申请日：2003-09-10

Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION

Inventor： VAEZ-IRAVANI, Mehdi

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/474 ,  G01N21/956

Abstract: A compact surface inspection optical head is disclosed which comprises a frame with two rings of apertures (12a, 12b) therein. The first set of apertures (12a) surrounding and close to a normal direction (20’) to the surface to be inspected is connected to fibers used to collect scattered radiation useful for the detection of micro-scratches caused by chemical and mechanical polishing. A second ring of apertures (12b) at low elevation angles to the surface inspected is connected to fibers to collect radiation scattered by the surface inspected for anomaly detectoin on patterned surfaces. This ring of apertures (12b) segments azimuthally the collection space so that the signal outputs from detectors that are saturated by the pattern diffraction or scattering may be discarded and only the outputs of unsaturated detectors are used for anomaly detection. A pair of larger apertures (12c) in the double dark field positions may be employed for anomaly detection on unpatterned surfaces.

Abstract translation: 公开了一种紧凑的表面检查光学头，其包括其中具有两个孔环的框架。 围绕和接近待检查表面的正常方向的第一组孔径连接到用于收集用于检测由化学和机械抛光引起的微划痕的散射辐射的纤维。 在这些孔的位置被选择为远离图案化散射或衍射的情况下，这些孔及其相关联的纤维可用于图案化表面上的异常检测。 与被检查的表面的低仰角的第二个孔环连接到纤维上以收集由被检查的表面散射的辐射以在图案化表面上的异常检测。 这个孔环以方位方式分段收集空间，从而可以丢弃由图案衍射或散射饱和的检测器的信号输出，并且仅使用不饱和检测器的输出进行异常检测。 双暗场位置中的一对较大的孔可用于未图案化表面上的异常检测。 通过两个较大孔径的散射辐射可以被物镜或纤维束收集。

公开(公告)号：WO2005003746A1

公开(公告)日：2005-01-13

申请号：PCT/US2004/020483

申请日：2004-06-24

Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION ,  LEWIS, Isabella ,  VAEZ-IRAVANI, Mehdi

Inventor： LEWIS, Isabella ,  VAEZ-IRAVANI, Mehdi

IPC: G01N21/95

CPC classification number: G01N21/95623 ,  G01N21/474 ,  G01N21/8806 ,  G01N21/94 ,  G01N21/9501

Abstract: A surface inspection of the system applies a first oblique illumination beam and may also apply a second illumination a surface either sequentially or simultaneously. Radiation reflected or scattered is collected by preferably three collection channels and detected by three corresponding detector arrays, although a different number of channels and detector arrays may be used. One or both illumination beams are focused to a line on the surface to be inspected and each line is imaged onto one or more detector arrays in the up to three or more detection and collection channels. Relative motion is caused between the lines and the surface inspected in a direction perpendicular to the lines, thereby increasing throughput while retaining high resolution and sensitivity. The same detection channels may be employed by detecting scattered or reflected radiation from both illumination beams. Fourier filters may be employed to filter out diffraction at one or more different spatial frequencies.

Abstract translation: 系统的表面检查应用第一倾斜照明光束并且还可以顺序地或同时地施加第二照明表面。 尽管可以使用不同数量的通道和检测器阵列，但优选地通过三个收集通道收集反射或散射的辐射，并由三个相应的检测器阵列检测。 一个或两个照明光束被聚焦到要检查的表面上的线，并且每条线在多达三个或更多个检测和收集通道中成像到一个或多个检测器阵列上。 在垂直于线路的方向上在线和表面之间产生相对运动，从而提高吞吐量，同时保持高分辨率和灵敏度。 可以通过检测来自两个照明光束的散射或反射辐射来采用相同的检测通道。 可以使用傅立叶滤波器来滤出在一个或多个不同空间频率处的衍射。

公开(公告)号：WO2005065246A2

公开(公告)日：2005-07-21

申请号：PCT/US2004/043129

申请日：2004-12-17

Applicant: KLA- TENCOR TECHNOLOGIES CORPORATION ,  VAEZ-IRAVANI, Mehdi ,  ZHAO, Guoheng ,  STOWKOWSKI, Stanley E.

Inventor： VAEZ-IRAVANI, Mehdi ,  ZHAO, Guoheng ,  STOWKOWSKI, Stanley E.

IPC: G02B6/00 ,  G02B6/04 ,  G02B6/32 ,  G02B27/48

CPC classification number: G02B27/48 ,  G02B6/0001 ,  G02B6/04

Abstract: Disclosed are apparatus and methods for illuminating a sample, e.g. , during an inspection of such sample for defects. In one aspect, the illumination apparatus includes a bundle of fibers that each have a first end and a second end. The illumination apparatus further includes an illumination selector for selectively transmitting one or more incident beams into one or more corresponding first ends of the optical fibers so that the selected one or more incident beams are output from one or more corresponding second ends of the fibers. The illumination apparatus also includes a lens arrangement for receiving the selected one or more incidents beams output from the corresponding one or more second ends of the fibers and directing the selected one or more incident beams towards the sample. The lens arrangement and the fibers are arranged with respect to each other so as to image an imaging plane of the sample at the second ends of the fibers. In one aspect, the incident beams are laser beams. In a specific application of the invention, the sample is selected from a group consisting of a semiconductor device, a semiconductor wafer, and a semiconductor reticle.

Abstract translation: 公开了用于照亮样品的装置和方法，例如在检查这种样品的缺陷时。 一方面，照明装置包括一束纤维，每束纤维具有第一端和第二端。 照明装置还包括照明选择器，用于选择性地将一个或多个入射光束传输到光纤的一个或多个对应的第一端中，使得所选择的一个或多个入射光束从光纤的一个或多个对应的第二端输出。 照明设备还包括透镜装置，用于接收从光纤的对应的一个或多个第二端输出的所选择的一个或多个事件光束，并将所选择的一个或多个入射光束引向样品。 透镜布置和光纤相对于彼此布置，以便在纤维的第二端成像样品的成像平面。 一方面，入射光束是激光束。 在本发明的具体应用中，样品选自半导体器件，半导体晶片和半导体掩模版。

公开(公告)号：WO2003089872A3

公开(公告)日：2003-10-30

申请号：PCT/US2003/012070

申请日：2003-04-18

Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION

Inventor： VAEZ-IRAVANI, Mehdi ,  MILLER, Larry

IPC: G01N21/88

Abstract: A multi-spot inspection system employs an objective (30) for focusing an array of radiation beams (24) to a surface of an object (28) and a second objective (32) having a large numerical aperture for collecting scattered radiation (64) from the array of illuminated spots. The scattered radiation from each illuminated spot is focused to a corresponding optical fiber channel (34) so that information about a scattering may be conveyed to a corresponding detector in a remote detector array (36) for processing. For patterned surface inspection, a cross-shaped filter (90) is rotated along with the surface to reduce the effects of diffraction by Manhattan geometry. A spatial filter (92) in the shape of an annular aperture may also be employed to reduce scattering from patterns such as arrays on the surface.

公开(公告)号：WO2009032681A1

公开(公告)日：2009-03-12

申请号：PCT/US2008/074435

申请日：2008-08-27

Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION ,  MEHANIAN, Courosh ,  HANSEN, Hans, J. ,  WANG, Yingjian ,  BEN-DOV, Yuval ,  LI, Zheng-Wu ,  HILL, Andrew, V. ,  VAEZ-IRAVANI, Mehdi ,  ZIMMERMANN, Kurt

Inventor： MEHANIAN, Courosh ,  HANSEN, Hans, J. ,  WANG, Yingjian ,  BEN-DOV, Yuval ,  LI, Zheng-Wu ,  HILL, Andrew, V. ,  VAEZ-IRAVANI, Mehdi ,  ZIMMERMANN, Kurt

IPC: H01L21/66

CPC classification number: G02B21/18 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/8825 ,  G02B21/367

Abstract: A system is provided herein for inspecting a specimen. In one embodiment, the system may include a dual-channel microscope, two illuminators, each coupled for illuminating a different channel of the dual-channel microscope and two detectors, each coupled to a different channel of the dual-channel microscope for acquiring images of the specimen. Means are provided for separating the channels of the dual-channel microscope, so that the two detectors can acquire the images of the specimen at substantially the same time. In one embodiment, the channels of the dual-channel microscope may be spectrally separated by configuring the two illuminators, so that they produce light in two substantially non-overlapping spectral ranges. In another embodiment, the channels of the dual-channel microscope may be spatially separated by positioning the two detectors, so that the illumination light do not overlap and the fields of view of the two detectors do not overlap within a field of view of an objective lens included within the system.

Abstract translation: 本文提供了用于检查样本的系统。 在一个实施例中，系统可以包括双通道显微镜，两个照明器，每个照明器被耦合用于照亮双通道显微镜和两个检测器的不同通道，每个检测器耦合到双通道显微镜的不同通道，用于获取 标本。 提供了用于分离双通道显微镜的通道的装置，使得两个检测器可以在基本上同时获取样本的图像。 在一个实施例中，双通道显微镜的通道可以通过配置两个照明器进行光谱分离，使得它们产生两个基本上非重叠的光谱范围的光。 在另一个实施例中，双通道显微镜的通道可以通过定位两个检测器在空间上分离，使得照明光不重叠，并且两个检测器的视场在目标的视场内不重叠 镜头包含在系统内。

公开(公告)号：WO2006041944A3

公开(公告)日：2006-04-20

申请号：PCT/US2005/035867

申请日：2005-10-04

Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION ,  MILLER, Lawrence, Robert ,  VAEZ-IRAVANI, Mehdi

Inventor： MILLER, Lawrence, Robert ,  VAEZ-IRAVANI, Mehdi

IPC: G01N21/95 ,  G01N21/88

Abstract: Pixel intensities indicative of scattered radiation from portions of the inspected surface surrounding a location of a potential anomaly are also stored so that such data is available for quick review of the pixel intensities within a patch on the surface containing the location of the potential anomaly. Where rotational motion is caused between the illumination beam and the inspected surface, signal-to-noise ratio may be improved by comparing the pixel intensities of pixels at corresponding positions on two different surfaces that are inspected, where corresponding pixels at the same relative locations on the two different surfaces are illuminated and scattered radiation therefrom collected and detected under the same optical conditions.