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公开(公告)号：WO2021154754A1
公开(公告)日：2021-08-05
申请号：PCT/US2021/015128
申请日：2021-01-26
Applicant: LAM RESEARCH CORPORATION
Inventor： SAROBOL, Pylin , SAMULON, Eric , HAZARIKA, Pankaj , SMITH, Dennis , KERN, Kurt , DAS, Debanjan , EHRLICH, Darrell , PAPE, Eric A. , SCHICK, Matthew Brian
IPC: H01L21/67 , H01J37/32 , H01L21/687 , B23K26/26
Abstract: A component for use inside a semiconductor chamber with a laser textured surface facing a vacuum region inside the semiconductor chamber is provided.
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