公开(公告)号：WO2020036613A1

公开(公告)日：2020-02-20

申请号：PCT/US2018/050273

申请日：2018-09-10

Applicant: LAM RESEARCH CORPORATION

Inventor： SANCHEZ, Alejandro ,  FORD, Grayson ,  EHRLICH, Darrell ,  ALWAN, Aravind ,  LEUNG, Kevin ,  CONTRERAS, Anthony ,  HAN, Zhumin ,  CASAES, Raphael ,  WU, Joanna

IPC: H01L21/687 ,  H01L21/68

Abstract: A first edge ring for a substrate support is provided. The first edge ring includes an annular-shaped body and one or more lift pin receiving elements. The annular-shaped body is sized and shaped to surround an upper portion of the substrate support. The annular-shaped body defines an upper surface, a lower surface, a radially inner surface, and a radially outer surface. The one or more lift pin receiving elements are disposed along the lower surface of the annular-shaped body and sized and shaped to receive and provide kinematic coupling with top ends respectively of three or more lift pins.