公开(公告)号：WO2020036613A1

公开(公告)日：2020-02-20

申请号：PCT/US2018/050273

申请日：2018-09-10

Applicant: LAM RESEARCH CORPORATION

Inventor： SANCHEZ, Alejandro ,  FORD, Grayson ,  EHRLICH, Darrell ,  ALWAN, Aravind ,  LEUNG, Kevin ,  CONTRERAS, Anthony ,  HAN, Zhumin ,  CASAES, Raphael ,  WU, Joanna

IPC: H01L21/687 ,  H01L21/68

Abstract: A first edge ring for a substrate support is provided. The first edge ring includes an annular-shaped body and one or more lift pin receiving elements. The annular-shaped body is sized and shaped to surround an upper portion of the substrate support. The annular-shaped body defines an upper surface, a lower surface, a radially inner surface, and a radially outer surface. The one or more lift pin receiving elements are disposed along the lower surface of the annular-shaped body and sized and shaped to receive and provide kinematic coupling with top ends respectively of three or more lift pins.

公开(公告)号：WO2020180607A1

公开(公告)日：2020-09-10

申请号：PCT/US2020/020116

申请日：2020-02-27

Applicant: LAM RESEARCH CORPORATION

Inventor： BLANK, Richard ,  ALWAN, Aravind ,  BEHZIZ, Behnam ,  THAULAD, Peter ,  EMERSON, Mark E.

IPC: H01L21/677 ,  H01L21/67 ,  G01B11/02 ,  B25J9/16 ,  B25J19/02

Abstract: A robot calibration system includes a calibration fixture configured to be mounted on a substrate processing chamber. The calibration fixture includes at least one camera arranged to capture an image including an outer edge of a test substrate and an edge ring surrounding the test substrate. A controller is configured to receive the captured image, analyze the captured image to measure a distance between the outer edge of the test substrate and the edge ring, calculate a center of the test substrate based on the measured distance, and calibrate a robot configured to transfer substrate to and from the substrate processing chamber based on the calculated center of the test substrate.