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公开(公告)号：WO2021178593A1
公开(公告)日：2021-09-10
申请号：PCT/US2021/020748
申请日：2021-03-03
Applicant: LAM RESEARCH CORPORATION
Inventor： BIRRU, Krishna , KHO, Leonard Wai Fung , CHANDRASHEKAR, Anand , BOWES, Michael , SUN, Yong , ZHANG, Xing , SINGH, Sumit Subhash
IPC: C23C16/455 , C23C16/04 , C23C16/14 , C23C16/54 , H01L21/285
Abstract: Providing herein are methods of delivery of gas reactants to a processing chamber and related apparatus.
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