UV DETECTOR COMPRISING A RECTIFYING P-N JUNCTION
    2.
    发明申请
    UV DETECTOR COMPRISING A RECTIFYING P-N JUNCTION 审中-公开
    包括修复P-N结的UV检测器

    公开(公告)号:WO2018060240A1

    公开(公告)日:2018-04-05

    申请号:PCT/EP2017/074483

    申请日:2017-09-27

    CPC classification number: C23C16/407 C23C16/408 H01L31/032 H01L31/109

    Abstract: The first object of the invention is directed to a UV detector comprising a p-n junction with a substrate coated with a layer of p-type oxide material, said p-type oxide material being coated with a layer of n-type oxide material which is ZnO. Said UV detector is remarkable in that said p-type oxide material consists of CuCrO2, wherein the ratio Cr/Cu ratio within said layer of p-type oxide material is >1. The second object of the invention is directed to a method for producing said UV-visible detector. It comprises the step of assembling at least one p-n junction with optical means adapted for sensing UV light. The use of said UV-visible detector as flame detector is also disclosed.

    Abstract translation: 本发明的第一个目的涉及一种UV检测器,其包括具有涂覆有p型氧化物材料层的衬底的pn结,所述p型氧化物材料涂覆有 n型氧化物材料是ZnO。 所述UV检测器的显着之处在于所述p型氧化物材料由CuCrO 2组成,其中所述p型氧化物材料层内的比率Cr / Cu比率> 1。 本发明的第二个目的涉及一种用于制造所述UV-可见光检测器的方法。 它包括将至少一个p-n结与用于感测UV光的光学装置组装的步骤。 还公开了所述紫外可见检测器作为火焰检测器的用途。

    METHOD FOR DEPOSITING ALUMINA BY ATOMIC LAYER DEPOSITION

    公开(公告)号:WO2018115369A1

    公开(公告)日:2018-06-28

    申请号:PCT/EP2017/084244

    申请日:2017-12-21

    Abstract: The invention is directed to a method for forming aluminium oxide on a substrate, said method comprising providing the substrate into a reaction chamber and performing at least one atomic layer deposition cycle, each cycle comprising the sequential steps (6;8) of exposing the substrate to a trimethylaluminium precursor into the reaction chamber and exposing the substrate to an oxidant into the reaction chamber. The method further comprises a step (4) of exposing the substrate to a diethylzinc precursor before or simultaneously to the step (6) or at least one of the steps (6) of exposing the substrate to the trimethylaluminum precursor.

    TRANSPARENT P-N JUNCTION PROVIDING A RECTIFYING CONTACT
    5.
    发明申请
    TRANSPARENT P-N JUNCTION PROVIDING A RECTIFYING CONTACT 审中-公开
    透明P-N接头提供了修复接触

    公开(公告)号:WO2018060237A1

    公开(公告)日:2018-04-05

    申请号:PCT/EP2017/074479

    申请日:2017-09-27

    CPC classification number: C23C16/407 C23C16/408

    Abstract: The first object of the invention is directed to a three-layer architecture p-n junction comprising a substrate as first layer, a second layer of p-oxide material coated on said substrate, and a third layer of n-oxide material coated on said second layer; wherein said third layer of n-oxide material comprises ZnO. Said p-n junction is remarkable in that said second layer of p-oxide material consists of CuCrO2 wherein the Cr/Cu ratio within said layer is >1. The second object of the invention is a method for forming the p-n junction as defined in the first object using the steps of coating the substrate with CuCrO2 by MOCVD and of coating said layer with ZnO by ALD. The third object of the invention concerns the use of said p-n junction as a diode in a photodiode array of the detection unit of a UV detector.

    Abstract translation: 本发明的第一个目的涉及三层结构pn结,其包括作为第一层的衬底,涂覆在所述衬底上的第二p-氧化物材料层以及第三层n 涂覆在所述第二层上的氧化物材料; 其中所述第三n-氧化物材料层包含ZnO。 所述p-n结的显着之处在于所述第二层p氧化物材料由CuCrO 2组成,其中所述层内的Cr / Cu比率> 1。 本发明的第二个目的是一种形成如第一个目的中定义的p-n结的方法,该方法使用通过MOCVD用CuCrO 2涂覆衬底和用ALD涂覆ZnO的步骤。 本发明的第三个目的涉及将所述p-n结用作UV检测器的检测单元的光电二极管阵列中的二极管。

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