公开(公告)号：WO1998009104A1

公开(公告)日：1998-03-05

申请号：PCT/US1997015232

申请日：1997-08-25

Applicant: MKS INSTRUMENTS, INC.

Inventor： MKS INSTRUMENTS, INC. ,  CLARK, William, R.

IPC: F16K49/00

CPC classification number: F16K49/002

Abstract: A fluid flow apparatus (200) includes a valve (118) with a fluid inlet (123), outlet (124), and channel (126) extending from inlet (123) to outlet (124) so that fluid may flow therethrough. The valve (118) also includes an obstructor (122) disposed in the fluid flow channel (126) and mechanically coupled to an electric motor (110) for selectively obstructing the fluid flow channel and thereby restricting a flow of fluid therethrough. A current limiting resistor (210) provides an electrical resistance to current flow through the electric motor (110). The current limiting resistor (210), located in proximity to the valve (118), generates heat as a function of current flowing through the motor and heats the valve (118).

Abstract translation: 流体流动装置（200）包括具有流体入口（123），出口（124）和从入口（123）延伸到出口（124）的通道（126）的阀门（118），使得流体可以流过其中。 阀（118）还包括设置在流体流动通道（126）中并机械地联接到电动机（110）的阻塞器（122），用于选择性地阻塞流体流动通道，从而限制流体流过其中。 限流电阻器（210）为通过电动机（110）的电流提供电阻。 位于阀（118）附近的限流电阻（210）产生作为流过电动机的电流的函数的热量，并加热阀（118）。

公开(公告)号：WO1997019329A1

公开(公告)日：1997-05-29

申请号：PCT/US1996017630

申请日：1996-10-31

Applicant: MKS INSTRUMENTS, INC.

Inventor： MKS INSTRUMENTS, INC. ,  HINKLE, Luke, D.

IPC: G01F25/00

CPC classification number: G01F25/0038 ,  G01F25/0053

Abstract: Apparatus for and method of measuring mass flow of a gas in a gas delivery system. The apparatus is adapted to be connected to a source of a gas. The apparatus includes a fixed-volume chamber (14) in fluid connection with the gas source (12). A flow control device (20) can be used to control the flow of the gas into the chamber. A transducer assembly (31) comprises, in combination, a pressure transducer (30) in fluid connection with the chamber, and a signal modifying network (32) associated with the pressure transducer. The pressure transducer permits measurement of the pressure of the gas in the chamber and provides a first electrical signal representative of the pressure of the known volume of the gas. The signal modifying network modifies the first signal to produce an output signal which is proportional to PV/RT and thus directly represents the number of moles of the gas in the chamber. The apparatus is useful for calibrating mass flow controllers and the like.

Abstract translation: 用于测量气体输送系统中气体的质量流量的装置和方法。 该装置适于连接到气体源。 该装置包括与气体源（12）流体连接的固定容积室（14）。 可以使用流量控制装置（20）来控制进入腔室的气体的流动。 传感器组件（31）组合包括与腔室流体连接的压力传感器（30）和与压力传感器相关联的信号修改网络（32）。 压力传感器允许测量腔室中的气体的压力，并提供代表已知体积气体的压力的第一电信号。 信号修改网络修改第一信号以产生与PV / RT成比例的输出信号，因此直接表示腔室中气体的摩尔数。 该装置可用于校准质量流量控制器等。

公开(公告)号：WO1997001747A1

公开(公告)日：1997-01-16

申请号：PCT/US1996010800

申请日：1996-06-24

Applicant: MKS INSTRUMENTS, INC.

Inventor： MKS INSTRUMENTS, INC. ,  HINKLE, Luke, D.

IPC: G01L27/00

CPC classification number: G01L27/005

Abstract: A pressure measurement and calibration apparatus for accurately detecting fluid pressures in the range of between approximately 0 and 1000 millitorr, and more particularly in the range of between 0 and 10 millitorr, and a method for calibrating an external pressure measuring device using the apparatus. The apparatus employs a pressure sensing assembly (12) having a deflectable diaphragm (14) and sensing electrodes (15). The assembly is rotated about an axis (17) which is normal to the direction of local gravitational acceleration through preselected angles relative to the direction of local gravitational acceleration. The apparatus generates an output signal representative of the deflection of the diaphragm (14) due to gravitational acceleration of the diaphragm (14) at a given angular orientation. The apparatus then controllably conducts a fluid flow against the diaphragm at a sufficient pressure to substantially eliminate the deflection attributable to gravity on the diaphragm.

Abstract translation: 一种压力测量和校准装置，用于精确地检测在大约0和1000毫托之间，更特别是在0和10毫托之间的范围内的流体压力，以及使用该装置来校准外部压力测量装置的方法。 该装置采用具有可偏转隔膜（14）和感测电极（15）的压力感测组件（12）。 组件围绕与局部重力加速度方向垂直的轴线（17）旋转，相对于局部重力加速度的方向通过预选角度。 该装置产生表示由于隔膜（14）在给定的角度方向的重力加速度而使隔膜（14）偏转的输出信号。 然后，该装置以足够的压力可控地传导抵靠隔膜的流体流，以基本上消除归因于隔膜上的重力的偏转。

公开(公告)号：WO1996025990A1

公开(公告)日：1996-08-29

申请号：PCT/US1996002016

申请日：1996-02-13

Applicant: MKS INSTRUMENTS, INC.

Inventor： MKS INSTRUMENTS, INC. ,  EWING, James, H.

IPC: B01B01/00

CPC classification number: B01D1/221 ,  B01D1/0011 ,  B01D3/346 ,  F24V99/00

Abstract: A liquid vaporizer (100) includes a stack of coaxially aligned, thermally conductive, thin, flat disks (120) having different diameters. The larger diameter disks (140) each include at least one aperture and preferably a plurality of closely spaced apertures (146) radially located a predetermined distance from the center of the disk (140). The vaporizer (100) further includes means (170) for establishing a liquid film on at least a portion of the surfaces of the larger diameter disks (140) and for accelerating the vaporization of the liquid thereon by passing a gas through the apertures (146) of the larger diameter disks (140) over the liquid film on the portion of the surfaces of the larger diameter disks (140).

Abstract translation: 液体蒸发器（100）包括具有不同直径的同轴对准，导热，薄的扁平盘（120）的堆叠。 较大直径的盘（140）各自包括至少一个孔，并且优选地多个与盘（140）的中心预定距离径向定位的紧密间隔开的孔（146）。 蒸发器（100）还包括用于在大直径盘（140）的至少一部分表面上建立液膜的装置（170），并且用于通过使气体通过孔（146）来加速其上的液体蒸发 ）在较大直径的盘（140）的表面的部分上的液膜上方的较大直径盘（140）。

公开(公告)号：WO1996003012A1

公开(公告)日：1996-02-01

申请号：PCT/US1995008647

申请日：1995-07-11

Applicant: MKS INSTRUMENTS, INC.

Inventor： MKS INSTRUMENTS, INC. ,  ERICSON, Richard, D.

IPC: H05B03/00

CPC classification number: F16K49/002 ,  Y10T137/6606

Abstract: A heated fluid control valve (10) comprises fluid inlet and outlet passages separated by a metallic flapper plate (12) disposed in the fluid passageway and mounted on, and in thermal contact with, an elongated, rotatable metallic shaft (16) that passes laterally through the fluid passageway (14). The shaft (16) comprises an electrical heater (44) and a thermocouple (48) having electrical wire connections accessed through an external end of the rotatable shaft (16).

Abstract translation: 加热的流体控制阀（10）包括由设置在流体通道中的金属挡板（12）分开的流体入口和出口通道，并安装在与横向通过的细长可旋转的金属轴（16）处并与其热接触 通过流体通道（14）。 轴（16）包括电加热器（44）和具有通过可旋转轴（16）的外端接入的电线连接的热电偶（48）。

公开(公告)号：WO1994011699A1

公开(公告)日：1994-05-26

申请号：PCT/US1993010608

申请日：1993-11-05

Applicant: MKS INSTRUMENTS, INC.

Inventor： MKS INSTRUMENTS, INC. ,  JUDD, David, R. ,  McLOUGHLIN, Robert, F.

IPC: G01B07/16

CPC classification number: G01D3/036

Abstract: Temperature compensation circuitry employing a single temperature compensation element (18) is disclosed. By use of a single temperature compensation element, the effects of temperature on both zero offset and signal gain of a sensor (10) may be adjusted. In addition, the circuit provides the unique capability of employing a single temperature compensation element while permitting for the independent adjustment of compensation of zero offset and signal gain.

Abstract translation: 公开了采用单个温度补偿元件（18）的温度补偿电路。 通过使用单个温度补偿元件，可以调节温度对传感器（10）的零点偏移和信号增益的影响。 此外，电路提供采用单个温度补偿元件的独特能力，同时允许对零偏移和信号增益的补偿进行独立调整。

公开(公告)号：WO1998024536A1

公开(公告)日：1998-06-11

申请号：PCT/US1997022143

申请日：1997-12-05

Applicant: MKS INSTRUMENTS, INC.

Inventor： MKS INSTRUMENTS, INC. ,  PENN, Stephen, M. ,  MCALLISTER, C., Bruce

IPC: B01D59/44

CPC classification number: H01J49/025

Abstract: Ions in a chamber or space are detected using an electron multiplier (10) operating at relatively low gain. The electron multiplier is placed in communication with the chamber, such as a chamber of a mass spectrometer (305), such that ions from the chamber enter the electron multiplier. A bias voltage (102, 302) applied to the multiplier sets the gain of the multiplier. By setting the gain at a relatively low value, the gain of the multiplier remains independent of chamber pressure, such that an accurate pressure measurement is obtained without calibration at a particular pressure or as a function of pressure.

Abstract translation: 使用在较低增益下工作的电子倍增器（10）来检测室或空间中的离子。 电子倍增器被放置成与腔室连通，例如质谱仪室（305），使得来自腔室的离子进入电子倍增器。 施加到乘法器的偏置电压（102,302）设定乘数的增益。 通过将增益设置在相对较低的值，倍增器的增益保持独立于腔室压力，使得在没有在特定压力下的压力或作为压力的函数下获得精确的压力测量。

公开(公告)号：WO1998008593A1

公开(公告)日：1998-03-05

申请号：PCT/US1997016046

申请日：1997-08-25

Applicant: MKS INSTRUMENTS, INC.

Inventor： MKS INSTRUMENTS, INC. ,  ROBERTSON, Jerry, L.

IPC: B01D59/44

CPC classification number: H03J7/16 ,  H01J49/022 ,  H01J49/4215 ,  H03J7/14

Abstract: The disclosed self tuning electrical system includes a transformer (258) having a primary and a secondary. The transformer primary is coupled to receive an electrical drive signal and the transformer primary presents an electrical input impedance to the drive signal. The transformer secondary is electrically connected to a load circuit (2). The system includes tuning components (280, 282, 284, 286, 288, 289 and 290) for tuning the system by adjusting a relationship between the inductance provided by the transformer and the capacitance of the load circuit according to a function of the input impedance. The tuning components may tune the system by adjusting the inductance provided by the capacitance provided by the load circuit.

Abstract translation: 所公开的自调谐电气系统包括具有初级和次级的变压器（258）。 变压器初级耦合以接收电驱动信号，并且变压器初级对驱动信号呈现电输入阻抗。 变压器二次电连接到负载电路（2）。 该系统包括调谐组件（280,282,284,286,288,289和290），用于通过根据输入阻抗的函数调整由变压器提供的电感和负载电路的电容之间的关系来调谐系统 。 调谐组件可以通过调整由负载电路提供的电容提供的电感来调谐系统。

公开(公告)号：WO1998002723A1

公开(公告)日：1998-01-22

申请号：PCT/US1997010537

申请日：1997-06-16

Applicant: MKS INSTRUMENTS, INC.

Inventor： MKS INSTRUMENTS, INC. ,  PANDORF, Robert, C. ,  NAVARO, Paul, W.

IPC: G01L07/00

CPC classification number: B32B27/12 ,  B32B5/022 ,  B32B27/281 ,  B32B2255/10 ,  B32B2255/205 ,  B32B2262/0269 ,  B32B2262/101 ,  B32B2307/304 ,  G01L9/0072 ,  G01L19/04 ,  G01L19/142 ,  Y10T442/657 ,  Y10T442/67

Abstract: The disclosed pressure transducer assembly (200) includes an external enclosure (212), a thermal shell (216) disposed within the external enclosure, and a pressure sensor (210) disposed within the thermal shell. The pressure sensor senses the gas or vapor pressure present in a tube (214) coupling the sensor to a source of pressurized gas or vapor. The assembly includes a device (218) for heating the thermal shell, and thermal insulation is disposed between the thermal shell and the external enclosure. The thermal insulation includes a plurality of metalized high temperature films stacked one on top of another and a plurality of spacer layers, each of the spacer layers being disposed between adjacent ones of the metalized high temperature films.

Abstract translation: 所公开的压力传感器组件（200）包括外壳（212），设置在外壳内的热壳（216）和设置在热壳内的压力传感器（210）。 压力传感器感测存在于将传感器耦合到加压气体或蒸气源的管（214）中的气体或蒸汽压力。 组件包括用于加热热壳的装置（218），并且热绝缘体设置在热壳和外壳之间。 热绝缘体包括多个层叠在一起的金属化高温膜和多个间隔层，每个间隔层设置在相邻的金属化高温膜之间。

公开(公告)号：WO1996000376A1

公开(公告)日：1996-01-04

申请号：PCT/US1995006328

申请日：1995-05-19

Applicant: MKS INSTRUMENTS, INC.

Inventor： MKS INSTRUMENTS, INC. ,  HINKLE, Luke, D. ,  PROVOST, James

IPC: G01F01/68

CPC classification number: G01F1/6847

Abstract: The mass flow transducer including a balanced bridge (58) having two, substantially identical, thermal elements (68, 70) forming two sides of the bridge between the top and the bottom of the bridge, the two elements positioned in two regions of a laminar flow tube in a symmetrical tandem arrangement so as to sense flow through the tube (22), one element being upstream from the other. The transducer includes a controller (100) for monitoring the voltage at the top and bottom of the bridge and monitoring the current required to maintain the node between the thermal elements at virtual ground.

Abstract translation: 所述质量流量传感器包括平衡桥（58），所述平衡桥具有两个基本上相同的热元件（68,70），形成所述桥的顶部和底部之间的所述桥的两侧，所述两个元件位于层叠的两个区域中 流管以对称串联布置，以便感测通过管（22）的流动，一个元件在另一个上游。 换能器包括用于监测桥的顶部和底部的电压并监测在虚拟地面处的热元件之间维持节点所需的电流的控制器（100）。