公开(公告)号：WO2023067580A1

公开(公告)日：2023-04-27

申请号：PCT/IB2022/060178

申请日：2022-10-24

Applicant: NOVA MEASURING INSTRUMENTS INC.

Inventor： POIS, Heath ,  LEE, Wei Ti ,  WARAD, Laxmi ,  KISLITSYN, Dmitry ,  LUND, Parker ,  TSENG, Benny ,  CHEN, James ,  SINGH, Saurabh

IPC: G01N23/223 ,  G01B15/02 ,  H01L21/66

Abstract: A system to characterize a film layer within a measurement box is disclosed. The system obtains a first mixing fraction corresponding to a first X-ray beam, the mixing fraction represents a fraction of the first X-ray beam inside a measurement box of a wafer sample, the measurement box represents a bore structure disposed over a substrate and having a film layer disposed inside the bore structure. The system obtains a contribution value for the measurement box corresponding to the first X-ray beam, the contribution value representing a species signal outside the measurement box that contributes to a same species signal inside the measurement box. The system obtains a first measurement detection signal corresponding to a measurement of the measurement box using the first X-ray beam. The system determines a measurement value of the film layer based on the first measurement detection signal, the contribution value, and the first mixing fraction.

公开(公告)号：WO2020190643A1

公开(公告)日：2020-09-24

申请号：PCT/US2020/022407

申请日：2020-03-12

Applicant: NOVA MEASURING INSTRUMENTS, INC.

Inventor： POIS, Heath, A. ,  WARAD, Laxmi ,  RANGARAJAN, Srinivasan

IPC: G01N23/085 ,  G01N23/22 ,  G01N23/223 ,  G01N23/2273 ,  G01N23/02 ,  G01N23/083 ,  G01B15/00 ,  G01B15/02 ,  G01B11/00 ,  G01B11/06

Abstract: Quantification of the passivation and the selectivity in deposition process is disclosed. The passivation is evaluated by calculating film thicknesses on pattern lines and spaces. An XPS signal is used, which is normalized with X-ray flux number. The method is efficient for calculating thickness in selective deposition process, wherein the thickness can be used as metric to measure selectivity. Measured photoelectrons for each of the materials can be expressed as a function of the thickness of the material overlaying it, adjusted by material constant and effective attenuation length. In selective deposition over a patterned wafer, the three expressions can be solved to determine the thickness of the intended deposition and the thickness of any unintended deposition over passivated pattern.