摘要:
An apparatus for misalignment compensation in optical joysticks is described. The optical joystick includes a light source, a plurality of photodetectors, and circuitry for controlling operation of the optical joystick.In some embodiments, each of the photodetectors may partitioned into a plurality of photodetector elements and select photodetector elements are configured to be individually activated in order to cause an electrical shifting of the selected photodetector elements to achieve a different operational alignment position of optical components of the optical joystick. In some embodiments, the light source may be similarly be calibrated by individually activating portions of a light-source array to cause an electrical shift. Various other embodiments and methods of operation are also described.
摘要:
A device has a micro electromechanical structure (10) with a first arm (102), at least one second arm (1 04a, b) connected to each other via a connection (100). Both arms (102, 104a, b) and the connection (100) are preferably made of a single crystalline body. The first and second arm (102, 1 04a, b) have end portions attached to a substrate, but otherwise the arms and their connection are free to move relative to the substrate. The first and second arm (102, 1 04a, b) extending from the end portions to the connection (100) along different directions, preferably perpendicularly to each other. An electrode (12) is provided on the substrate, adjacent to the micro electromechanical structure (10) to excite vibration of the structure. The two arms in different directions make it possible to reduce the nonlinearity of the stiffness during vibrations of the structure.
摘要:
The invention relates to a pointing device and a method for processing signals from such a pointing device, said device comprising a base and an actuator movable with respect to the base, and a detector, said detector adapted for providing at least first and second positional signals indicating a position of the actuator with respect to the base along corresponding first and second axes, wherein said signal processing method comprises the steps of converting the at least two positional signals into a polar coordinate signal comprising a magnitude signal, and thresholding the magnitude signal of the polar coordinate signal to provide a thresholded magnitude signal. In an embodiment the method further comprising the step of applying a conversion curve to the thresholded magnitude signal to produce a velocity magnitude signal.
摘要:
A resonator comprises a resonator mass (34), a first connector (30) on a first side of the mass connected between the resonator mass and a first fixed mounting and a second connector (32) on a second, opposite, side of the mass connected between the resonator mass and a second fixed mounting. Drive means drives the mass (34) into a resonant mode in which it oscillates in a sideways direction, thereby compressing one of the first and second connectors while extending the other of the first and second connectors.
摘要:
A pressure/vacuum sensor and method, comprising: driving a MEMS piezoresistive resonator (8) into resonant vibration, applying Joule heating to the resonator (8); and sensing a variable parameter that varies in response to the tendency of the resonant frequency (fo) to depend upon the temperature of the resonator (8), the temperature thereof depending upon the pressure. The variable parameter may be the resonant frequency of the resonator (8), or a change therein, or may be derived from a feedback loop, being for example a time integrated feedback signal (82) or a reading (94) of the sense current (22), the loop keeping the resonant frequency constant in opposition to the above mentioned tendency. A reference MEMS capacitive resonator (62) may be located in the vicinity of the resonator (8) for compensating purposes.
摘要:
A microphone comprises a substrate (20), a microphone membrane (10) defining an acoustic input surface and a backplate (11) supported with respect to the membrane with a fixed spacing between the backplate (11) and the membrane (10). A microphone periphery area comprises parallel corrugations (24) in the membrane (10) and backplate (11). By using the same corrugated suspension for both the membrane and the backplate, the sensitivity to body noise is optimally suppressed.
摘要:
A novel Si MEMS piezoresistive resonator is described. The resonator has a shape of a frame, such as a ring or a polygon frame, which has two or more anchors. Electrodes located at the outer or inner rim of the resonant structure are used to excite the structure electrostatically into resonance with a desired mode shape. One or plurality of locally doped regions on the structure is used for piezoresistive readout of the signal. In the most preferred embodiments, the structure is a ring, which has four anchors, two electrodes and four piezoresistive regions at different segments of the structure. The piezoresistive regions are alternatively located at the outer rim and inner rim of the structure in such a way that the piezoresistive signals of the same sign from different regions can be collected. Advantages of this device are large readout signal, large electrode area, robustness, suppressed out-of-plane vibration and larger usable linear range.
摘要:
An oscillator device comprises a resonator mass which is connected by a spring arrangement to a substrate and a feedback element for controlling oscillation of the resonator mass, which comprises a piezoresistive element connected between the resonator mass and the substrate. The invention provides an oscillator device in which the two parts (resonator and circuit to close the oscillation loop) are combined inside one single oscillator device, which can be a MEMS device.
摘要:
The present invention relates to a detection system for the detection of movements of a movable object. The detection system may comprises: a light emitting device (S) for emitting light, a reflecting unit (5) being arranged in functional connection with the movable object and being adapted for reflecting the emitted light, a plurality of detectors (D1 to D4) for detecting the reflected light and outputting detection signals for determining a movement of the movable object. When reflecting the emitted light, the reflecting unit causes a light spot to be incident on the plurality of detectors, and the plurality of detectors are arranged in a predetermined manner so as to be located completely inside the light spot irrespective of any movement of the movable object. The present invention further relates to a method of detecting movements of the movable object, and an IC having implemented therein the detection system.
摘要:
The optical pointing device of the present invention comprises a base and an actuator movable connected to the base, wherein the actuator comprises a reflective portion on a side facing the base, and wherein the base comprises a light source for emitting light towards the reflective portion of the actuator, a detector comprising one of more detection units for detecting at least a part of the light reflected by the reflective portion of the actuator, and a transparent element arranged between the actuator and at least one of the light source and the detection units, for providing a closed transparent housing for the light source and/or the detection units.