公开(公告)号：WO1993018525A1

公开(公告)日：1993-09-16

申请号：PCT/US1993002061

申请日：1993-03-12

Applicant: PARK SCIENTIFIC INSTRUMENTS CORP.

Inventor： PARK SCIENTIFIC INSTRUMENTS CORP. ,  LINKER, Frederick, I. ,  KIRK, Michael, D. ,  SWIFT, Peter, R. ,  ALEXANDER, John, D. ,  PARK, Sang-il ,  PARK, Sung-il ,  SMITH, Ian, R. ,  PARISH, David, M. ,  LEE, Jeong, Ho ,  HOWLAND, Rebecca, S.

IPC: G21K05/10

CPC classification number: G01Q70/02 ,  G01Q30/025 ,  G01Q30/04 ,  G02B21/002 ,  G02B21/26 ,  Y10S977/85 ,  Y10S977/851

Abstract: A scanning probe microscope (100) has a probe (101) removably mounted in the head (108), using kinematic mounting techniques. A motorized, non-stacked x, y coarse movement stage (116) is kinematically positioned with respect to the base (114). A motorized z coarse movement stage (112) positions the head kinematically with respect to the base (114) and allows the height, tilt and pitch of the probe (101) to be adjusted. The scanner (118) includes x, y and z sample position detectors which provide an accurate measurement of the position of the sample with respect to the probe. The outputs of the x, y and z position detectors may also be connected in feedback loops with the controller (110) to improve the performance of the scanning probe microscope (100). An optical viewing assembly (124) provides combined coaxial and oblique views of the cantilever (102) and sample (104). A graphical user interface has simultaneous on-screen optical and scanning probe microscope views.

Abstract translation: 扫描探针显微镜（100）具有可移动地安装在头部（108）中的探针（101），使用运动学安装技术。 电动的，非堆叠的x，y粗移动台（116）相对于基座（114）运动地定位。 机动化z粗动台（112）将头部相对于底座（114）运动地定位，并允许调节探头（101）的高度，倾斜和俯仰。 扫描器（118）包括x，y和z采样位置检测器，其提供样品相对于探针的位置的精确测量。 x，y和z位置检测器的输出也可以与控制器（110）连接在反馈回路中，以改善扫描探针显微镜（100）的性能。 光学观察组件（124）提供悬臂（102）和样品（104）的组合的同轴和斜视图。 图形用户界面具有同时的屏幕光学和扫描探针显微镜视图。