DEVICE FOR DETECTING CHARGED PARTICLES AND AN APPARATUS FOR MASS SPECTROMETRY INCORPORATING THE SAME
    1.
    发明申请
    DEVICE FOR DETECTING CHARGED PARTICLES AND AN APPARATUS FOR MASS SPECTROMETRY INCORPORATING THE SAME 审中-公开
    用于检测带电粒子的装置和用于包含该粒子的质谱分析装置

    公开(公告)号:WO2017196863A1

    公开(公告)日:2017-11-16

    申请号:PCT/US2017/031785

    申请日:2017-05-09

    CPC classification number: H01J49/025 B32B3/26

    Abstract: A device for detecting charged particles includes a substrate, a charge detection plate and an integrated circuit unit that are electrically connected together and respectively disposed on non-coplanar first and second sides of the substrate, and an interference shielding unit substantially enclosing the charge detection plate and the integrated circuit unit in such a manner as to permit impingement on the charge detection plate by the charged particles from outside of the interference shielding unit. The integrated circuit unit disposed on the second side is non-coplanar with the charge detection plate disposed on the first side so as to prevent interference on the integrated circuit unit by the charged particles.

    Abstract translation: 用于检测带电粒子的装置包括基板,电荷检测板和集成电路单元,它们电连接在一起并分别设置在基板的非共面的第一和第二侧上,并且干涉 屏蔽单元基本上以这样的方式包围电荷检测板和集成电路单元,从而允许来自干扰屏蔽单元外部的带电粒子撞击在电荷检测板上。 设置在第二侧上的集成电路单元与设置在第一侧上的电荷检测板不共面,以防止带电粒子对集成电路单元的干扰。

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