公开(公告)号：WO2015161879A1

公开(公告)日：2015-10-29

申请号：PCT/EP2014/058349

申请日：2014-04-24

Applicant: SHT SMART HIGH TECH AB

Inventor： JIANG, Di ,  LIU, Johan Jianying

IPC: H01L23/538

CPC classification number: H01L23/49877 ,  H01L21/486 ,  H01L21/568 ,  H01L23/49827 ,  H01L23/49838 ,  H01L23/4985 ,  H01L23/5389 ,  H01L24/24 ,  H01L24/25 ,  H01L24/82 ,  H01L2224/2401 ,  H01L2224/24137 ,  H01L2224/245 ,  H01L2224/25175 ,  H01L2224/82005 ,  H01L2224/82101 ,  H01L2224/82951 ,  H01L2924/0002 ,  H01L2924/00 ,  H01L2924/01006 ,  H01L2924/00012

Abstract: There is provided a method for manufacturing a flexible film comprising carbon nanotube interconnects, the method comprising: providing a first substrate; forming and patterning a catalyst layer on the substrate; forming vertically aligned electrically conducting carbon nanotube bundles from the catalyst; providing a second substrate opposite the first substrate and in contact with the carbon nanotube bundles such that a gap is formed between the first and second substrates; providing a flowing curable polymer in the gap between the first substrate and the second substrate such that the gap is filled by the polymer; curing the polymer to form a flexible solid; and removing the first substrate and the second substrate to provide a flexible polymer film comprising carbon nanotube interconnects connectable on respective sides of the film.

Abstract translation: 提供了一种制造包含碳纳米管互连的柔性膜的方法，所述方法包括：提供第一基板; 在衬底上形成和图案化催化剂层; 从催化剂形成垂直排列的导电碳纳米管束; 提供与所述第一基板相对并与所述碳纳米管束接触的第二基板，使得在所述第一和第二基板之间形成间隙; 在所述第一基板和所述第二基板之间的间隙中提供流动的可固化聚合物，使得所述间隙由所述聚合物填充; 固化聚合物以形成柔性固体; 并且移除第一基板和第二基板，以提供包括在膜的相应侧面上可连接的碳纳米管互连的柔性聚合物膜。