-
公开(公告)号：WO2018049426A1
公开(公告)日：2018-03-15
申请号：PCT/US2017/051234
申请日：2017-09-12
申请人： SITIME CORPORATION
摘要： Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.
摘要翻译： 空间分布式谐振MEMS传感器被协调以产生指示区域接触力，环境条件和/或环境组成的频率调制信号。
-
公开(公告)号：WO2018152265A1
公开(公告)日：2018-08-23
申请号：PCT/US2018/018261
申请日：2018-02-14
申请人： SITIME CORPORATION
CPC分类号： B81C1/00293 , B81B7/0041 , B81B2201/0271 , B81B2201/032 , B81C2203/0145
摘要： A semiconductor device (100, 200) includes a first silicon layer (111) disposed between second and third silicon layers and separated therefrom by respective first and second oxide layers. A cavity (102) within the first silicon layer is bounded by interior surfaces of the second and third silicon layers, and a passageway (101) extends through the second silicon layer to enable material removal from within the semiconductor device to form the cavity. A metal feature (105) is disposed within the passageway to hermetically seal the cavity.
-
公开(公告)号：WO2016205770A1
公开(公告)日：2016-12-22
申请号：PCT/US2016/038275
申请日：2016-06-19
申请人： SITIME CORPORATION
发明人： GROSJEAN, Charles, I. , MILLER, Nicholas , HAGELIN, Paul, M , HILL, Ginel, C. , DOLL, Joseph, C. , CHOKSHI, Trushal , ZHANG, Yi , PARTRIDGE, Aaron , LUTZ, Markus
CPC分类号： H03H9/2452 , H03H9/02401 , H03H9/02448
摘要： In a MEMS device having a substrate and a moveable micromachined member, a mechanical structure secures the moveable micromachined member to the substrate, thermally isolates the moveable micromachined member from the substrate and provides a conduction path to enable heating of the moveable micromachined member to a temperature of at least 300 degrees Celsius.
摘要翻译： 在具有衬底和可移动微加工构件的MEMS器件中，机械结构将可移动微加工构件固定到衬底，将可移动的微加工构件与衬底隔离，并提供传导路径，以使可移动微机械构件加热到温度 至少300摄氏度。
-
-
搜索结果
3 条记录 (耗时 0.014 秒)
