公开(公告)号：WO2009126952A2

公开(公告)日：2009-10-15

申请号：PCT/US2009040346

申请日：2009-04-13

Applicant: UNIV NORTHEASTERN ,  SRIDHAR SRINIVAS ,  GULTEPE EVIN ,  NAGESHA DATTATRI

Inventor： SRIDHAR SRINIVAS ,  GULTEPE EVIN ,  NAGESHA DATTATRI

IPC: H01L51/00

CPC classification number: H01L51/0048 ,  B81B2207/07 ,  B81C1/00031 ,  B81C2201/0183 ,  B82Y10/00 ,  G11C13/025 ,  H01L51/0006 ,  H01L51/057 ,  Y02E10/549 ,  Y02P70/521

Abstract: Nanoelements such as single walled carbon nanotubes are assembled in three dimensions into a nanoscale template on a substrate by means of electrophoresis and dielectrophoresis at ambient temperature. The current-voltage relation indicates that strong substrate-nanotube interconnects carrying mA currents are established inside the template pores. The method is suitable for large-scale, rapid, three-dimensional assembly of 1,000,000 nanotubes per square centimeter area using mild conditions. Circuit interconnects made by the method can be used for nanoscale electronics applications.

Abstract translation: 诸如单壁碳纳米管的纳米元件通过在环境温度下的电泳和介电电泳在三维上组装成衬底上的纳米尺度模板。 电流 - 电压关系表明在模板孔内部建立了承载mA电流的强衬底 - 纳米管互连。 该方法适用于使用温和条件的每平方厘米面积的1,000,000纳米管的大规模，快速，立体的组装。 通过该方法制造的电路互连可用于纳米级电子应用。

公开(公告)号：WO2010096023A1

公开(公告)日：2010-08-26

申请号：PCT/SG2010/000056

申请日：2010-02-12

Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH ,  HO, Yoke Yee, Audrey ,  RODRIGUEZ FERNANDEZ, Isabel

Inventor： HO, Yoke Yee, Audrey ,  RODRIGUEZ FERNANDEZ, Isabel

IPC: C09J9/00 ,  B82B3/00

CPC classification number: B29C59/022 ,  B29C33/3814 ,  B29C39/026 ,  B29C41/00 ,  B29C2043/025 ,  B29C2059/023 ,  B81B2207/053 ,  B81C1/00111 ,  B81C2201/0183 ,  C09J7/00 ,  C09J2201/626 ,  Y10T428/24479

Abstract: A method of forming a high aspect ratio adhesive structure, the method comprising fabricating a porous template comprising at least a first tier and a second tier; introducing a softened polymer into the template; and separating the polymer from the template.

Abstract translation: 一种形成高纵横比粘合剂结构的方法，所述方法包括制造至少包括第一层和第二层的多孔模板; 将软化聚合物引入模板中; 并将聚合物与模板分离。

公开(公告)号：WO2007047523A2

公开(公告)日：2007-04-26

申请号：PCT/US2006040229

申请日：2006-10-16

Applicant: UNIV PENNSYLVANIA ,  JOSHI SANJAY ,  FONASH STEPHEN J ,  NAM WOOK JUN ,  GARG PRANAV

Inventor： JOSHI SANJAY ,  FONASH STEPHEN J ,  NAM WOOK JUN ,  GARG PRANAV

IPC: B81C3/00

CPC classification number: B81C3/002 ,  B01J31/124 ,  B01J35/0013 ,  B81B2207/07 ,  B81C1/00492 ,  B81C2201/0183 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  C25D1/006 ,  C25D1/04 ,  G03F7/0002

Abstract: The invention relates to a method of forming at least one nano-structure with a reusable template structure having a channel. The method includes introducing at least one reagent into the channel, and reacting the at least one reagent to form a nano-structure within the channel. The nano-structure forming channel may be positioned in alignment with one or more electrode structures, which may be positioned within or upon the substrate, may be embedded in the reusable template structure, and/or may be external electrode structures positioned outside of the reusable template structure and independent of the substrate. In addition, the electrode structures may be a source material for the formation of the nano-structure in the channel.

Abstract translation: 本发明涉及一种用具有通道的可重复使用的模板结构形成至少一个纳米结构的方法。 该方法包括将至少一种试剂引入通道中，并使该至少一种试剂反应以在通道内形成纳米结构。 纳米结构形成通道可以被定位成与可以位于基底内或基底上的一个或多个电极结构对准，可以嵌入在可重复使用的模板结构中，和/或可以是位于可重复使用的外部的外部电极结构 模板结构和独立的基板。 此外，电极结构可以是用于在通道中形成纳米结构的源材料。

公开(公告)号：WO2008054379A2

公开(公告)日：2008-05-08

申请号：PCT/US2006041810

申请日：2006-10-25

Applicant: MASSACHUSETTS INST TECHNOLOGY ,  HART ANASTASIOS JOHN ,  SLOCUM ALEXANDER HENRY

Inventor： HART ANASTASIOS JOHN ,  SLOCUM ALEXANDER HENRY

IPC: H01L29/06 ,  H01L21/469

CPC classification number: B81C1/00031 ,  B81B2203/04 ,  B81B2207/07 ,  B81C1/00634 ,  B81C2201/0154 ,  B81C2201/0183

Abstract: A method and apparatus for growing nanostructures is presented. A growth substrate including at least one reaction site is provided as is a device disposed proximate the growth substrate. Energy is provided to the reaction site and a reaction species is introduced to the growth substrate. This results in a nanostructure growing from the reaction site wherein the growth process of the nanostructure is controlled by providing a force to the device.

Abstract translation: 介绍了一种生长纳米结构的方法和设备。 提供包括至少一个反应位点的生长基底，以及靠近生长基底设置的装置。 将能量提供给反应位点并将反应物质引入生长基质。 这导致从反应位点生长的纳米结构，其中纳米结构的生长过程通过向装置提供力来控制。

公开(公告)号：WO2004076345A1

公开(公告)日：2004-09-10

申请号：PCT/SG2004/000043

申请日：2004-02-26

Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH ,  SANDER, Melissa ,  TAN, Le-Shon

Inventor： SANDER, Melissa ,  TAN, Le-Shon

IPC: B82B3/00

CPC classification number: B81C1/00031 ,  B81C2201/0183 ,  B82Y15/00 ,  B82Y30/00

Abstract: A template is provided (12’) on a substrate (10) with a pattern of nanoscale pores (14) extending through to the substrate. The template (12’) may be, for example, porous anodic alumina. Self-assembling molecules (20) are then introduced to the template, such as by immersing a template in a solution (18) of these molecules. The self-assembling molecules (20) have a bonding group that will bond with the substrate. The result is that the self-assembling molecules (20), possibly after being triggered to self-assemble, assemble to form nanoscale islands in the pores. The template may be stripped from the substrate and nanoparticles (30) or biomolecules (40) may be attached to the nanoislands.

Abstract translation: 在衬底（10）上提供具有延伸穿过衬底的纳米级孔（14）图案（12'）的模板。 模板（12'）可以是例如多孔阳极氧化铝。 然后将自组装分子（20）引入模板，例如通过将模板浸入这些分子的溶液（18）中。 自组装分子（20）具有将与基底结合的键合基团。 结果是，自组装分子（20）可能在被触发自组装之后组装以在孔中形成纳米级岛。 模板可以从基底剥离，并且纳米颗粒（30）或生物分子（40）可以附着到纳米区域。

公开(公告)号：WO2016053745A1

公开(公告)日：2016-04-07

申请号：PCT/US2015/051923

申请日：2015-09-24

Applicant: INVENSENSE, INC.

Inventor： TSAI, Julius Ming-Lin ,  DANEMAN, Michael

IPC: H04R17/02 ,  H04R31/00

CPC classification number: B81B7/02 ,  B81B2201/0257 ,  B81B2203/04 ,  B81B2207/015 ,  B81B2207/07 ,  B81B2207/094 ,  B81C1/00246 ,  B81C2201/0123 ,  B81C2201/013 ,  B81C2201/0183 ,  B81C2203/0714 ,  B81C2203/075 ,  H01L2224/48091 ,  H01L2924/15151 ,  H04R17/02 ,  H04R31/006 ,  H04R2201/003 ,  H01L2924/00014

Abstract: A piezoelectric microphone and/or a piezoelectric microphone system is presented herein. In an implementation, a piezoelectric microphone includes a microelectromechanical systems (MEMS) layer and a complementary metal-oxide-semiconductor (CMOS) layer. The MEMS layer includes at least one piezoelectric layer and a conductive layer. The conductive layer is deposited on the at least one piezoelectric layer and is associated with at least one sensing electrode. The CMOS layer is deposited on the MEMS layer. Furthermore, a cavity formed in the CMOS layer includes the at least one sensing electrode

Abstract translation: 此处呈现压电麦克风和/或压电麦克风系统。 在一个实现中，压电麦克风包括微机电系统（MEMS）层和互补金属氧化物半导体（CMOS）层。 MEMS层包括至少一个压电层和导电层。 导电层沉积在至少一个压电层上并且与至少一个感测电极相关联。 CMOS层沉积在MEMS层上。 此外，形成在CMOS层中的空腔包括至少一个感测电极

公开(公告)号：WO1994001262A1

公开(公告)日：1994-01-20

申请号：PCT/EP1993001571

申请日：1993-06-21

Applicant: KERNFORSCHUNGSZENTRUM KARLSRUHE GMBH ,  BÜRKERT GMBH & CO. ,  BACHER, Walter ,  BIEDERMANN, Hans ,  DINGLREITER, Heinz ,  KALB, Helmut

Inventor： KERNFORSCHUNGSZENTRUM KARLSRUHE GMBH ,  BÜRKERT GMBH & CO.

IPC: B29C33/52

CPC classification number: B29C43/021 ,  B29C33/0033 ,  B29C2059/023 ,  B29L2011/0016 ,  B29L2031/14 ,  B29L2031/7506 ,  B29L2031/7532 ,  B81C99/0085 ,  B81C2201/0183 ,  B81C2201/056

Abstract: A process for manufacturing micro-structured bodies made of plastics has the following steps: a) a micro-structured plate-like base body is used, the first side of which represents a first surface of reference and the second side of which is micro-structured in such a way that micro-structured bodies made of plastics project on a structure bottom, and the structure bottom and the reference surface extend parallel to each other; b) a second, micro-structured side of the base body is coated with a material; c) the surface of the base body-coating material is faced parallel to the first reference surface, forming a second reference surface; d) the base body is abraded on its first side parallel to the second reference surface at least until the structure bottom is reached, and then e) the material is selectively removed from the plastics.