公开(公告)号：WO2008144318A1

公开(公告)日：2008-11-27

申请号：PCT/US2008/063541

申请日：2008-05-13

Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION ,  CAI, Zhongping ,  SLOBODOV, Alexander ,  ROMANOVSKY, Anatoly ,  WOLTERS, Christian, H.

Inventor： CAI, Zhongping ,  SLOBODOV, Alexander ,  ROMANOVSKY, Anatoly ,  WOLTERS, Christian, H.

IPC: G01N21/95 ,  H01J43/18

CPC classification number: G01N21/9501 ,  G01N21/8851 ,  G01N2201/1241 ,  G01N2201/12769 ,  H01J43/18 ,  H01J43/30

Abstract: An inspection system and method is provided herein for increasing the detection range of the inspection system. According to one embodiment, the inspection system may include a photodetector having a plurality of stages, which are adapted to convert light scattered from a specimen into an output signal, and a voltage divider network coupled for extending the detection range of the photodetector (and thus, the detection range of the inspection system) by saturating at least one of the stages. This forces the photodetector to operate in a non-linear manner. However, measurement inaccuracies are avoided by calibrating the photodetector output to remove any non-linear effects that may be created by intentionally saturating the at least one of the stages. In one example, a table of values may be generated during a calibration phase to convert the photodetector output into an actual amount of scattered light.

Abstract translation: 本文提供了一种用于增加检查系统的检测范围的检查系统和方法。 根据一个实施例，检查系统可以包括具有多个级的光电检测器，其适于将从样本散射的光转换成输出信号，以及耦合的用于扩展光电检测器的检测范围的分压器网络 ，检查系统的检测范围）通过饱和至少一个级。 这迫使光电探测器以非线性方式工作。 然而，通过校准光电检测器输出以消除可能通过故意饱和至少一个级而产生的任何非线性效应来避免测量不准确。 在一个示例中，可以在校准阶段期间生成值表，以将光电检测器输出转换成实际的散射光量。

公开(公告)号：WO2008106391A1

公开(公告)日：2008-09-04

申请号：PCT/US2008/054860

申请日：2008-02-25

Applicant: UNIVERSITY OF SOUTH CAROLINA ,  MYRICK, Michael, L. ,  PROFETA, Luisa

Inventor： MYRICK, Michael, L. ,  PROFETA, Luisa

IPC: G01J1/42

CPC classification number: G01J3/28 ,  G01J3/02 ,  G01J3/0232 ,  G01J3/12 ,  G01N21/274 ,  G01N21/31 ,  G01N2201/12769

Abstract: The present subject matter is direct to methodologies for calibrating data obtained from an optical analysis system. An initial calibration matrix of sampled analyte concentrations is modified using mean-centering techniques and selection of low and high analyte concentration spectra to produce a two-point calibration. A modified calibration matrix is produced by generating a non-linear calibration matrix by multiplying the initial calibration matrix by the two-point calibration. In an alternate embodiment, an initial multivariate optical element design is modified by iteratively adjusting the design based on standard error of calibration determination based on non-linerly fitted functions.

Abstract translation: 本主题直接涉及用于校准从光学分析系统获得的数据的方法。 使用平均定心技术和低分辨率和高分析物浓度光谱的选择来修改采样分析物浓度的初始校准矩阵，以产生两点校准。 通过将初始校准矩阵乘以两点校准来生成非线性校准矩阵来产生修改的校准矩阵。 在替代实施例中，通过基于非线性拟合函数的校准确定的标准误差迭代地调整设计来修改初始多变量光学元件设计。

公开(公告)号：WO1987004240A1

公开(公告)日：1987-07-16

申请号：PCT/US1987000051

申请日：1987-01-09

Applicant: ANDROS ANALYZERS INCORPORATED

Inventor： ANDROS ANALYZERS INCORPORATED ,  PASSARO, Robert, Eugene ,  ROGERS, Raymond, Earl ,  GRIFFITH, Craig, James

IPC: G01J01/00

CPC classification number: G01N21/274 ,  G01N21/3504 ,  G01N2021/3159 ,  G01N2021/3166 ,  G01N2201/126 ,  G01N2201/1273 ,  G01N2201/12769

Abstract: Automatic zeroing apparatus zeroes an infrared gas analyzer automatically upon the occurrence of preselected conditions to indicate zero in the absence of absorption of infrared radiation by a gas mixture being analyzed. The gas analyzer has a sample cell (11) for containing a gas mixture to be analyzed. Infrared radiation directed through the sample cell (11) is detected at a preselected wavelength to produce a detection signal. A signal processor outputs a signal systematically related to the difference between the detection signal and a reference signal. For zeroing the sample cell (11) is filled with gas substantially nonabsorbent of infrared radiation at the respective characteristic wavelength. A comparator produces an error signal when the output signal differs from zero. A gain control (DAC 21) automatically controls the signal level of the detection signal to reduce the output signal substantially to zero with the nonabsorbent gas filling the sample cell (11). The preselected conditions may include the passage of a predetermined time and a temperature drift beyond a predetermined limit.