公开(公告)号：WO2008144318A1

公开(公告)日：2008-11-27

申请号：PCT/US2008/063541

申请日：2008-05-13

Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION ,  CAI, Zhongping ,  SLOBODOV, Alexander ,  ROMANOVSKY, Anatoly ,  WOLTERS, Christian, H.

Inventor： CAI, Zhongping ,  SLOBODOV, Alexander ,  ROMANOVSKY, Anatoly ,  WOLTERS, Christian, H.

IPC: G01N21/95 ,  H01J43/18

CPC classification number: G01N21/9501 ,  G01N21/8851 ,  G01N2201/1241 ,  G01N2201/12769 ,  H01J43/18 ,  H01J43/30

Abstract: An inspection system and method is provided herein for increasing the detection range of the inspection system. According to one embodiment, the inspection system may include a photodetector having a plurality of stages, which are adapted to convert light scattered from a specimen into an output signal, and a voltage divider network coupled for extending the detection range of the photodetector (and thus, the detection range of the inspection system) by saturating at least one of the stages. This forces the photodetector to operate in a non-linear manner. However, measurement inaccuracies are avoided by calibrating the photodetector output to remove any non-linear effects that may be created by intentionally saturating the at least one of the stages. In one example, a table of values may be generated during a calibration phase to convert the photodetector output into an actual amount of scattered light.

Abstract translation: 本文提供了一种用于增加检查系统的检测范围的检查系统和方法。 根据一个实施例，检查系统可以包括具有多个级的光电检测器，其适于将从样本散射的光转换成输出信号，以及耦合的用于扩展光电检测器的检测范围的分压器网络 ，检查系统的检测范围）通过饱和至少一个级。 这迫使光电探测器以非线性方式工作。 然而，通过校准光电检测器输出以消除可能通过故意饱和至少一个级而产生的任何非线性效应来避免测量不准确。 在一个示例中，可以在校准阶段期间生成值表，以将光电检测器输出转换成实际的散射光量。

公开(公告)号：WO2011028748A2

公开(公告)日：2011-03-10

申请号：PCT/US2010/047442

申请日：2010-09-01

Applicant: KLA-TENCOR CORPORATION ,  PETRENKO, Aleksey ,  WOLTERS, Christian ,  CAI, Zhongping ,  ROMANOVSKY, Anatoly ,  WHITESIDE, Bret

Inventor： PETRENKO, Aleksey ,  WOLTERS, Christian ,  CAI, Zhongping ,  ROMANOVSKY, Anatoly ,  WHITESIDE, Bret

IPC: H01L21/66

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N2201/06113 ,  G01N2201/0633 ,  G02B27/0972

Abstract: A method and apparatus for producing high frequency dynamically focused oblique laser illumination for a spinning wafer inspection system. The focus is changed by changing the beam direction incidence angle so as to bring focal spot onto the wafer surface. Disclosed herein is a system and method for automatic beam shaping (i.e., spot size) and steering (i.e., position) for a spinning wafer inspection system, combined into a single module. Also disclosed is a method and system for measuring the beam position/size/shape and angle with sufficient resolution to make corrections using feedback from the monitor.

Abstract translation: 一种用于生产用于旋转晶片检测系统的高频动态聚焦倾斜激光照明的方法和装置。 通过改变光束方向入射角来改变焦点，以便将焦斑引入晶片表面。 本文公开了一种用于旋转晶片检查系统的自动光束成形（即光点尺寸）和转向（即，位置）的系统和方法，其组合成单个模块。 还公开了一种用于以足够的分辨率测量光束位置/尺寸/形状和角度以使用来自监视器的反馈进行校正的方法和系统。

公开(公告)号：WO2011028748A3

公开(公告)日：2011-08-04

申请号：PCT/US2010047442

申请日：2010-09-01

Applicant: KLA TENCOR CORP ,  PETRENKO ALEKSEY ,  WOLTERS CHRISTIAN ,  CAI ZHONGPING ,  ROMANOVSKY ANATOLY ,  WHITESIDE BRET

Inventor： PETRENKO ALEKSEY ,  WOLTERS CHRISTIAN ,  CAI ZHONGPING ,  ROMANOVSKY ANATOLY ,  WHITESIDE BRET

IPC: H01L21/66

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N2201/06113 ,  G01N2201/0633 ,  G02B27/0972

Abstract: A method and apparatus for producing high frequency dynamically focused oblique laser illumination for a spinning wafer inspection system. The focus is changed by changing the beam direction incidence angle so as to bring focal spot onto the wafer surface. Disclosed herein is a system and method for automatic beam shaping (i.e., spot size) and steering (i.e., position) for a spinning wafer inspection system, combined into a single module. Also disclosed is a method and system for measuring the beam position/size/shape and angle with sufficient resolution to make corrections using feedback from the monitor.

Abstract translation: 一种用于为旋转晶片检测系统产生高频动态聚焦倾斜激光照明的方法和设备。 通过改变光束方向入射角来改变焦点，从而将焦斑带到晶片表面上。 本文公开了用于旋转晶片检查系统的自动光束整形（即，光斑尺寸）和转向（即，位置）的系统和方法，其被组合成单个模块。 还公开了一种用于以足够的分辨率测量光束位置/大小/形状和角度以使用来自监视器的反馈进行校正的方法和系统。