公开(公告)号：WO2023059634A1

公开(公告)日：2023-04-13

申请号：PCT/US2022/045669

申请日：2022-10-04

申请人： MATERION CORPORATION

发明人： KELLER, Reto ,  KOBA, Richard

IPC分类号： G01J5/02 ,  G01J5/04 ,  G01J5/20 ,  H01L31/09 ,  B81C1/00 ,  B81B7/00 ,  B23K1/005 ,  B81B7/0035 ,  B81C1/00317 ,  G01J2005/202 ,  G01J5/0235 ,  G01J5/024 ,  G01J5/045 ,  G01J5/0802

摘要： Techniques and/or systems are disclosed herein for forming a window cavity wafer that includes fabricating a window wafer by: providing a window wafer substrate having two faces; etching fiducials onto one or more faces of the window wafer substrate; and applying one or more optical coatings to on one or more faces of the window wafer substrate. Next, fabricating a spacer wafer separate from the window wafer by: providing a spacer wafer substrate having two faces; and forming an array of through-holes in the spacer wafer substrate. Then, bonding the spacer wafer to the window wafer to form the window cavity wafer; and forming discrete metal frames on a face of the window cavity wafer.