一种用于液体检测的薄膜体声波传感器

    公开(公告)号:WO2021114493A1

    公开(公告)日:2021-06-17

    申请号:PCT/CN2020/077378

    申请日:2020-03-02

    IPC分类号: G01N29/036 G01N27/02

    摘要: 一种用于液体检测的薄膜体声波传感器,包括基底(101)、声反射层(102)、压电薄膜(103)、金属电极对(105)以及微流体通道(104),其中,金属电极对(105)由两个金属激励电极(105a、105b)组成,其中一个金属激励电极位于压电薄膜(103)的一侧,另一个金属激励电极位于压电薄膜(103)的另一侧,微流体通道(104)设置于压电薄膜(103)与其中一个金属激励电极之间。由于金属电极对(105)产生的高频电场能够穿过微流体通道(104)中的液体,使得该传感器对所测试液体的电导性、介电性等电学性质具有较强的敏感特性,电场激发压电薄膜(103)产生的体声波在液体中传播形成谐振,直接接触所测物质,有利于提升传感器的灵敏性。

    GAS SENSOR WITH CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER STRUCTURE AND FUNCTIONAL POLYMER LAYER

    公开(公告)号:WO2021028827A1

    公开(公告)日:2021-02-18

    申请号:PCT/IB2020/057535

    申请日:2020-08-11

    摘要: The invention is a gravimetric gas sensor for the selective detection of inorganic "acidic" gases, such as sulfur dioxide and carbon dioxide, in a gas mixture, without limiting the possibilities of use with other gases. The sensor consists of the structure and functional material of a capacitive micromachined ultrasonic transducer (CMUT). Known patents are close to this solution in that they are based on the measurement of changes in the resonant frequency of the CMUT structure. However, in order to selectively detect different gases, it is necessary to use different functional materials. The present invention is based on the use of functional polymers with specific properties, such as mPEI (methylated polyethyleneimine), without limiting the use of other polymers with suitable properties. The issue being addressed is more accurate, faster and more efficient gas detection and measurement of concentrations. The invention uses the cross-selectivity of the sensor for different gases, achieved by eliminating the need to modify the sensor with different materials, instead using a more complex measurement of the dynamic parameters of the detector. The structure of the CMUT is modified by functional material. Due to the interaction with the gas, the physical properties of the functional material (mass, modulus of elasticity) change, resulting in a change in the load parameters of the CMUT membrane that are measured. The invention can be applied by mining companies, and by a wide range of household consumers.