WOBBLE ADJUSTMENT CAPABILITY FOR POLYGON MIRRORS

    公开(公告)号:WO2023086681A1

    公开(公告)日:2023-05-19

    申请号:PCT/US2022/050002

    申请日:2022-11-15

    申请人: INNOVUSION, INC.

    摘要: A motorized optical scanner device (700) of a Light Detection and Ranging (LiDAR) scanning system used in a motor vehicle is disclosed. The motorized optical scanner device (700) comprises a glass-based optical reflector (702) including a plurality of reflective surfaces (704A-E) and a flange (902). The rotatable optical reflector device further comprises an adjustment ring (908) and a metal-based motor rotor body (904) at least partially disposed in an inner opening (920) of the glass-based optical reflector (702). The flange (902) extends from an inner sidewall (912) of the glass-based optical reflector (702) towards the metal-based motor rotor body (904). The flange (902) includes a first mounting surface (922) that is in contact with the adjustment ring (908). The motorized optical scanner device (700) further comprises a plurality of fastening mechanisms (804). The plurality of fastening mechanisms (804) facilitates applying adjustment forces to the adjustment ring (908) to reduce wobble associated with rotation of the glass-based optical reflector (702). When center of a polygon mirror is not perfectly in-line with its center of rotation, tilt angles of polygon facets may change in the process of angular rotation, and the polygon mirror may wobble. During the wobble adjustment process, at least two fastening mechanisms (804), e.g., adjustment screws, may be installed into at least two selected threaded holes (930) in motor assembly (910) to apply adjustment forces, e.g., pushing forces, to the adjustment ring (908) to reduce wobble.

    LOW COST BEAM-EXPANDING RELAY LENS
    2.
    发明申请

    公开(公告)号:WO2022245473A1

    公开(公告)日:2022-11-24

    申请号:PCT/US2022/026158

    申请日:2022-04-25

    摘要: A microscope is provided, comprising: a beam source that produces a laser beam; first and second scanning mirrors configured to operate along respective first and second perpendicular axes to reflect the laser beam from the beam source to scan a specimen via an objective lens; a first pair of cylindrical lenses, positioned between the objective lens and the first scanning mirror, at points along a straight line, with a focal point aligned with the first scanning mirror, that receive the reflected laser beam from the first scanning mirror and provide the laser beam to the objective lens; and a second pair of cylindrical lenses, positioned between the objective lens and the second scanning mirror, at points along the line, with a focal point aligned with the second scanning mirror, that receive the reflected laser beam from the second scanning mirror and provide the laser beam to the objective lens.

    LASER SCANNER APPARATUS AND METHOD OF OPERATION

    公开(公告)号:WO2022164748A1

    公开(公告)日:2022-08-04

    申请号:PCT/US2022/013506

    申请日:2022-01-24

    摘要: Various embodiments of a laser scanner apparatus (10) and a method (1400) of operating a laser scanner apparatus (10), as disclosed herein, include the use of a variably blocked aperture (46) or a controlled defocusing in relation to receiving backscattered light (18). One or more embodiments combine both variable blocking and defocusing and may use a lens design that complements the blocking and defocusing. Among the various advantages offered by one or more embodiments disclosed herein is a laser scanner apparatus (10) that exhibits a flatter response curve to backscattered light (18) over a defined range of distances. That is, among other advantages of the configurations and operating methods disclosed herein, a laser scanner apparatus (10) experiences less variation in the optical power delivered to its photodetector (54) arrangement, in relation to detecting an object at different distances within a defined range.

    MULTI PATTERN MASKLESS LITHOGRAPHY METHOD AND SYSTEM

    公开(公告)号:WO2022107116A1

    公开(公告)日:2022-05-27

    申请号:PCT/IL2021/050746

    申请日:2021-06-20

    申请人: ORBOTECH LTD.

    发明人: GOLD, Uri

    IPC分类号: G03F7/20 G02B26/12

    摘要: Maskless lithography apparatus including a chassis supporting a substrate onto which it is desired to write, an optical writing head, the optical writing head operating at at least one of a plurality of at least partially different wavelength/intensity ranges, a displacement subsystem for providing desired relative displacement between the substrate and the optical writing head and a writing controller operative to cause the optical writing head to sequentially write a plurality of different patterns at correspondingly different ones of the at least one of a plurality of at least partially different wavelength/intensity ranges.

    LIGHT DETECTION AND RANGING (LIDAR) SYSTEM HAVING ROTATABLE PRISM DISK FOR BEAM STEERING OF LASERS

    公开(公告)号:WO2022026836A1

    公开(公告)日:2022-02-03

    申请号:PCT/US2021/043911

    申请日:2021-07-30

    申请人: UATC, LLC

    IPC分类号: G01S7/481 G01S17/42 G02B26/12

    摘要: A LIDAR system includes a LIDAR unit. The LIDAR unit includes a housing defining a cavity. The LIDAR unit further include a plurality of emitters disposed on a circuit board within the cavity. The emitters respectively emit a laser beam along a transmit path. The LIDAR system further includes a first optic rotatable about a first axis at a first rotational speed and a second optic rotatable about a second axis at a second rotational speed that is faster than the first rotational speed. The first optic is positioned relative to the LIDAR unit such that a plurality of laser beams exiting the LIDAR unit pass through the first optic. The second optic is positioned relative to the first optic such that a plurality of refracted laser beams exiting the prism disk reflect off of the second optic.

    LASERSCANNER
    6.
    发明申请
    LASERSCANNER 审中-公开

    公开(公告)号:WO2021047846A1

    公开(公告)日:2021-03-18

    申请号:PCT/EP2020/072529

    申请日:2020-08-11

    IPC分类号: G01S7/481 G02B26/12 G02B5/09

    摘要: Die vorliegenden Erfindung betrifft einen LaserScanner (1) mit einem Gehäuse (23), einem Lasersender (11) mit einer Sendeapertur (S) für einen Sendestrahl (12), einem Laserempfänger (16) für einen Empfangsstrahl (15) und einer Strahlablenkeinrichtung in Form einer Spiegelpyramide (2), deren Pyramidenachse ihre Drehachse (21) und deren Pyramidenseiten jeweils eine Spiegelfacette (7 - 10) bilden, wobei der Lasersender (11) und der Laserempfänger (16) jeweils parallel zur Drehachse (21 ) der Spiegelpyramide (2) auf diese gerichtet sind, der Laserempfänger (16) zumindest eine der Spiegelpyramide (2) im Empfangsstrahlengang nachgeordnete Sammellinse (20) aufweist und die Sammellinse (20) in Richtung der Drehachse (21) gesehen in ihrem Überlappungsbereich mit den Spiegelfacetten (7 - 10) im Flächenvergleich zumindest so groß wie das Doppelte der größten aller in Richtung der Drehachse (21) betrachteten Spiegelfacetten (7 - 10) ist.

    LOW-ABERRATION HIGH-SPEED-COMPATIBLE OPTICAL DELAY LINES AND METHODS THEREOF

    公开(公告)号:WO2020257154A1

    公开(公告)日:2020-12-24

    申请号:PCT/US2020/037871

    申请日:2020-06-16

    摘要: This disclosure describes an example architecture for providing a delay line for optical techniques. The delay line architecture includes a focusing element that has a focal axis disposed parallel to its length. The line of symmetry provided by the focal axis obviates path-length-dependent aberrations caused by the off-axis beam translations. The systems described herein also provide varying geometries of movable mirrors, including a galvanometer mirror and a rotating polygonal mirror. The systems and methods described herein also provide techniques for generating and detecting coherent Raman spectra using a picosecond probe pulse.

    走査光学系及び走査レンズ
    8.
    发明申请

    公开(公告)号:WO2020183707A1

    公开(公告)日:2020-09-17

    申请号:PCT/JP2019/010570

    申请日:2019-03-14

    摘要: 面上の走査方向をy軸、該面に垂直に入射する主光線をz軸、該主光線の該偏向器の反射点を原点、原点から該面までの距離をL、該面上における走査経路の長さをW、主光線が該走査レンズの出射面を通過する点のy座標の最大値及び最小値をそれぞれymax及びymin、該点における該出射面の主走査方向の曲率をc、材料の屈折率をnとし、該点における主走査方向のパワーΦ = (1-n)・cを定義し、yminから0.6ymin及び0.6ymaxからymaxの範囲におけるdΦ/dyの絶対値の最大値を|dΦ/dy|outとし、0.6yminから0.6ymaxの範囲におけるdΦ/dyの絶対値の最大値を|dΦ/dy |inとして、 0.54 ≦ L/W ≦ 0.64 |dΦ/dy|out/|dΦ/dy |in ≦ 0.5 を満たす走査光学系。

    LIDAR APPARATUS WITH ROTATABLE POLYGON DEFLECTOR HAVING REFRACTIVE FACETS

    公开(公告)号:WO2020142316A1

    公开(公告)日:2020-07-09

    申请号:PCT/US2019/068351

    申请日:2019-12-23

    IPC分类号: G01S7/481 G01S7/484 G02B26/12

    摘要: A LIDAR apparatus can include a polygon deflector that includes a plurality of facets. The LIDAR apparatus can include a motor rotatably coupled to the polygon deflector. The motor is configured to rotate the polygon deflector about a first axis orthogonal to a first plane. The LIDAR apparatus can include an optic positioned within an interior of the polygon deflector. The optic collimates a first beam to be incident on a particular facet of the plurality of facets. The particular facet of the plurality of facets refracts the first beam in the first plane between a first angle and a second angle as the polygon deflector rotates about the first axis to output a second beam. For use in an autonomous vehicle.

    キャリブレーションシステム及び描画装置

    公开(公告)号:WO2020100446A1

    公开(公告)日:2020-05-22

    申请号:PCT/JP2019/037994

    申请日:2019-09-26

    发明人: 菅原 雅史

    IPC分类号: G03F7/20 G02B26/12

    摘要: 長尺のシート状基板(2)に対して連続的なパターンを形成する場合に、随時キャリブレーションを行うことができるキャリブレーションシステム等を提供する。 キャリブレーションシステムは、露光ヘッド(41)を支持する露光ヘッド支持部(43)と、光センサを含むセンサユニット(45)と、露光時に、光センサの受光面が上記露光領域における露光面と平行となるようにセンサユニット(45)を支持すると共に、露光ヘッド支持部(43)に対してスライド移動可能に取り付けられたセンサユニット支持部(46)と、露光ヘッド支持部(43)及びセンサユニット支持部(46)を移動させる移動機構(44)と、制御部とを備え、制御部は、キャリブレーション時に露光ヘッド支持部(43)及びセンサユニット支持部(46)を移動させることにより、光センサの受光面を、露光ヘッドから出射するビームが露光時に入射する露光面に対応する位置に配置する。