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    EDGE INSPECTION SYSTEM FOR INSPECTION OF OPTICAL DEVICES
    2.
    发明申请
    EDGE INSPECTION SYSTEM FOR INSPECTION OF OPTICAL DEVICES 审中-公开

    公开(公告)号：WO2022240630A1

    公开(公告)日：2022-11-17

    申请号：PCT/US2022/027609

    申请日：2022-05-04

    申请人： APPLIED MATERIALS, INC.

    发明人： KEMP, Michael David-Scott ,  FU, Jinxin

    IPC分类号： G01N21/95 ,  G01N21/55 ,  G01M11/02 ,  G06T2207/30148 ,  G06T7/0004 ,  H04N23/55 ,  H04N23/56

    摘要： Embodiments described herein relate to an inspection system for illumination of optical devices. The inspection system includes a stage, a focusing lens, a light source, a reflective surface, and a camera. The inspection system is operable to provide a light to a substrate. The substrate is positioned on the inspection system such that an edge of the substrate is exposed. The inspection system focuses light to the edge such that the light propagates through the substrate. The light is coupled out of the substrate, illuminating one or more optical devices disposed on the substrate. The illumination allows the camera to capture images to be inspected. The images are inspected to detect defects of the substrate.

    分析装置及び分析方法
    4.
    发明申请
    分析装置及び分析方法 审中-公开

    公开(公告)号：WO2022195994A1

    公开(公告)日：2022-09-22

    申请号：PCT/JP2021/046699

    申请日：2021-12-17

    申请人： 株式会社ＪＶＣケンウッド

    发明人： 齋藤　敦 ,  糸長　誠 ,  小野　雅之

    IPC分类号： G01N33/543 ,  G01N21/41 ,  G01N21/55

    摘要： 制御部（９）は反応領域を複数の単位区画に分割する。制御部（９）は、微粒子が存在しない単位区画の実測集計値と、単微粒子が存在する単位区画の実測集計値と、２個からｎ個までの近接微粒子が存在する単位区画の実測集計値との第１の配列データを作成する。制御部（９）は、確率理論による確率分布に基づき、第１の配列データと最も近似する、微粒子が存在しない単位区画の理論的集計値と、単微粒子が存在する単位区画の理論的集計値と、２個からｎ個までの近接微粒子が存在する単位区画の理論的集計値との第２の配列データを作成する。制御部（９）は、単微粒子が存在する単位区画の理論的集計値と２個からｎ個までの近接微粒子が存在する単位区画の理論的集計値とに基づいて、反応領域内の微粒子の計数値を生成する。

    SYSTEM, ROBOT AND METHOD FOR MEASURING THE COLOR OF AN AREA OF A SAMPLE OR OF A VEHICLE'S PART
    5.
    发明申请
    SYSTEM, ROBOT AND METHOD FOR MEASURING THE COLOR OF AN AREA OF A SAMPLE OR OF A VEHICLE'S PART 审中-公开

    公开(公告)号：WO2022157590A1

    公开(公告)日：2022-07-28

    申请号：PCT/IB2022/050118

    申请日：2022-01-07

    申请人： FYLA LASER, S. L.

    发明人： PÉREZ MILLÁN, Pere ,  ABREU ALFONSO, Javier

    IPC分类号： G01J3/02 ,  G01J3/10 ,  G01J3/42 ,  G01J3/50 ,  G01J3/46 ,  G01N21/55

    摘要： A system, robot and method to measure the color of an area of a sample. The system comprises a light source to emit spatially coherent light that comprises a broad spectrum of wavelengths; an optical arrangement to scan an area of the sample, part-by-part, with a collimated beam of said light; an optical spectrometer to receive scattered light and measure an optical spectrum for each part; and a computing device. The optical arrangement comprises a collimator and/or is configured to preserve collimated said spatially coherent light. The system is configured for synchronizing the scanning of the area with the recording of the optical spectra for the area's parts, the recording of the optical spectrum of each part lasting an optical spectrum integration time equal to the duration of the scan of said part. The computing device determines color coordinates, computes and analyzes an overall optical spectrum, calculates XYZ Tristimulus values.

    VORTEX POLARIMETER
    6.
    发明申请
    VORTEX POLARIMETER 审中-公开

    公开(公告)号：WO2022119660A1

    公开(公告)日：2022-06-09

    申请号：PCT/US2021/055961

    申请日：2021-10-21

    申请人： ONTO INNOVATION INC.

    发明人： JAMES, Kenneth E. ,  LESOINE, John F. ,  VAGOS, Pedro

    IPC分类号： G01N21/21 ,  G01N21/55 ,  G01J4/00 ,  G02B27/28 ,  G01N21/59

    摘要： An optical metrology device uses a multi-wavelength beam of light that has azimuthally varying polarization states and/or phase states, referred to as a vortex beam. The metrology device focuses the vortex beam on a sample under test over a large range of angles of incidence. The metrology device may detect an image of the vortex beam reflected from the sample and measure the polarization state of the return light as function of the angle of incidence and the azimuth angle, which may be further measured at a plurality of different wavelengths. The vortex beam includes azimuthally varying polarization states, thereby enabling measurement of all desired polarization states without requiring the use of moving optical components. The polarization state information detected over multiple angles of incidence and wavelengths provides data with which an accurate determination of one or more characteristics of a sample may be determined.

    CALIBRATION OF AZIMUTH ANGLE FOR OPTICAL METROLOGY STAGE USING GRATING-COUPLED SURFACE PLASMON RESONANCE
    8.
    发明申请
    CALIBRATION OF AZIMUTH ANGLE FOR OPTICAL METROLOGY STAGE USING GRATING-COUPLED SURFACE PLASMON RESONANCE 审中-公开

    公开(公告)号：WO2022055642A1

    公开(公告)日：2022-03-17

    申请号：PCT/US2021/044810

    申请日：2021-08-05

    申请人： ONTO INNOVATION INC.

    发明人： KELLER, Nicholas James

    IPC分类号： G01B11/26 ,  G01N21/17 ,  G01N21/21 ,  G01N21/47 ,  G01N21/55 ,  G01N21/552 ,  G03F7/20

    摘要： Grating-coupled surface plasmon resonance response of a calibration grating is used to calibrate the azimuth angle offset between a sample and the plane of incidence (POI) of the optical system of an optical metrology device. The calibration grating is configured to produce grating-coupled surface plasmon resonance in response to the optical characteristics of the optical metrology device. The calibration grating is coupled to the stage and positioned at a known azimuth angle with respect to the optical channel of the optical metrology device while the grating-coupled surface plasmon resonance response of the calibration grating is measured. The azimuth angle between an orientation of the calibration grating and the POI of the optical system is determined based on the grating-coupled surface plasmon resonance response. The determined azimuth angle may then be used to correct for an azimuth angle offset between the sample and the POI.

    A FABRICATION PROCESS DEVIATION DETERMINATION METHOD, CALIBRATION METHOD, INSPECTION TOOL, FABRICATION SYSTEM AND A SAMPLE
    9.
    发明申请
    A FABRICATION PROCESS DEVIATION DETERMINATION METHOD, CALIBRATION METHOD, INSPECTION TOOL, FABRICATION SYSTEM AND A SAMPLE 审中-公开

    公开(公告)号：WO2022028778A1

    公开(公告)日：2022-02-10

    申请号：PCT/EP2021/067854

    申请日：2021-06-29

    申请人： ASML NETHERLANDS B.V.

    发明人： HASAN, Shakeeb Bin ,  KUMAR, Nitish

    IPC分类号： G03F7/20 ,  G01N21/55 ,  G01N21/956

    摘要： The present disclosure relates to a method for determining deviations in a fabrication process, comprising the following steps: a. providing a sample with a layer having a periodic structure fabricated using the fabrication process and intended to cause a corresponding part of the layer to be fully reflective for light having a wavelength in a wavelength range and having an angle of incidence in an angle range; b. illuminating the sample with light having a wavelength in the wavelength range and an angle of incidence in the angle range; c. detecting light reflected and/or scattered from the layer of the sample; and d. determining deviations in the fabrication process from the detected light.

    DYNAMIC LASER POWER CONTROL FOR LIDAR SYSTEM
    10.
    发明申请
    DYNAMIC LASER POWER CONTROL FOR LIDAR SYSTEM 审中-公开

    公开(公告)号：WO2022005712A1

    公开(公告)日：2022-01-06

    申请号：PCT/US2021/036499

    申请日：2021-06-08

    申请人： BEIJING VOYAGER TECHNOLOGY CO., LTD. ,  CHEN, Wanli

    发明人： YEH, Yu-Ching ,  LU, Yue

    IPC分类号： G01S17/08 ,  G01S7/497 ,  G01S7/484 ,  H01S3/00 ,  G01S17/931 ,  G01N21/55 ,  G01S17/89 ,  G01S7/4814 ,  G01S7/4817

    摘要： Embodiments of the disclosure provide an optical sensing system, a method for controlling an emitting power level in the optical sensing system, and a control apparatus for controlling the emitting power level in the optical sensing system. The exemplary optical sensing system includes a transmitter configured to emit light beams at a plurality of vertical detection angles to scan an object. The optical sensing system further includes a controller configured to dynamically vary an emitting power level of the light beams emitted at the respective vertical detection angles. The optical sensing system also includes a receiver configured to detect the light beams returned by the object.