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发明授权
CN101517725B 用于离子注入系统的工件处理扫描臂 失效 - 权利终止

用于离子注入系统的工件处理扫描臂
摘要：
本发明提供一种离子注入设备、系统和用于将工件保持装置连接并断开到扫描臂的方法。提供一种扭转头，其中静电夹盘可操作地被安装，其中与一个或多个扭转头和静电夹盘结合的一个或多个旋转和非旋转部件具有一个或多个与其结合的动态流体密封。静电夹盘还可操作地从扭转头上去除，而不需要断开一个或多个动态流体密封。
摘要（英）：

The present invention provides an ion implantation apparatus, system, and method for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating members associated with one or more of the twist head and electrostatic chuck have one or more dynamic fluid seals associated therewith. The electrostatic chuck is further operable to be removed from the twist head without disconnecting the one or more dynamic fluid seals.

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