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发明公开
CN103728842A 光刻机照明系统照明镜组单元的调整支撑机构 有权 转让

光刻机照明系统照明镜组单元的调整支撑机构
摘要：
一种光刻机照明系统照明镜组单元的调整支撑机构，包含固定在底板上的前端支撑装置、第一后端支撑装置、第二后端支撑装置、连接第一后端支撑装置和第二后端支撑装置的后端支撑，所述前端支撑装置、后端支撑和照明镜组单元固定连接，本发明调整支撑机构可以实现照明镜组单元的安装调整和支撑固定，对照明镜组单元进行X、Y、Z方向及绕其旋转的六个自由度方向进行调整，安装调整固定方便，具有较高的定位精度。
摘要（英）：

An adjusting and supporting mechanism of an illuminating lens unit of a photoetching machine illuminating system comprises a front-end supporting device fixed on a baseplate, a first rear-end supporting device, a second rear-end supporting device and a rear-end support for connecting the first rear-end supporting device with the second rear-end supporting device, wherein the front-end supporting device, the rear-end support and the illuminating lens unit are fixedly connected. The adjusting and supporting device can realize mounting adjustment and supporting fixation of the illuminating lens unit, the illuminating lens unit is adjusted in X, Y and Z directions and six directions with freedom degrees rotating around the illuminating lens unit, and the mechanism is convenient to mount, adjust and fix and has higher positioning accuracy.

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