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发明公开
CN104703080A 微机电系统麦克风构件和具有所述微机电系统麦克风构件的设备 失效 - 权利终止

微机电系统麦克风构件和具有所述微机电系统麦克风构件的设备
摘要：
本发明提出一种容性MEMS麦克风构件，其能够可选地运行用于检测声学信号(麦克风模式)或用于检测在限定的频率范围中的超声波信号(超声波模式)。在所述MEMS麦克风构件(100)的层结构中至少两个承载元件(11、12)相叠地并且相互间隔开地构造，所述至少两个承载元件用于电容器装置的两个电极侧，所述电容器装置用于信号检测。所述两个承载元件中的至少一个(11)是声压敏感的，其中，所述两个电极侧中的至少一个包括能够相互独立地电接触的至少两个电极区段(51、52)，所述至少两个电极区段连同另一电极侧的至少一个电极(11)形成相互独立的子电容根据本发明，如果所述声压敏感的承载元件(11)以限定的频率的超声波被激励进行更高模式的振动，则所述电极区段(51、52)的形状和平面延展通过所述声压敏感的承载元件的振动波腹的位置和延展确定。
摘要（英）：

It is proposed a capacitive MEMS microphone device that selectively for detecting acoustic signals (microphone mode) or for detecting ultrasonic signals within a defined frequency range (ultrasonic mode) can be operated. In the layer structure of the MEMS microphone device (100) are at least two carrier elements (11, 12) for the two electrode sides of a capacitor array for signal detection above the other and spaced from each other is formed. At least one of the two carrier elements (11) is sound-pressure-sensitive and at least one of the two electrode sides comprises at least two independently electrically contactable electrode portions (51, 52) which form independent sub-capacitors together with the at least one electrode (11) of the other electrode side. According to the invention, the shape and planar extent of the electrode sections (51, 52) determined by the location and extent of the anti-nodes of the sound pressure-sensitive carrier element (11) when it is excited with a defined frequency to the ultrasonic vibrations of a higher mode.

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