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发明公开
CN104797930A 热流传感器，包括至少一个此类传感器的气体传感器以及包括至少一个此类传感器的皮拉尼规 有权

热流传感器，包括至少一个此类传感器的气体传感器以及包括至少一个此类传感器的皮拉尼规
摘要：
本发明涉及一种热流传感器，该热流传感器包括悬挂到支撑件上的至少一个第一悬挂元件(2)，所述第一悬挂元件(2)由导电材料制成，所述悬挂元件(2)的第一偏置装置(6)以及用于测量悬挂元件(2)的末端处的电压的变化的第一测量装置(8)，所述第一悬挂元件(2)由纳米线形成，并且所述第一偏置装置(6)由交变电流源形成，所述交变电流源的强度通过焦耳效应加热第一悬挂元件(2)。所述传感器能够采用多个悬挂纳米线的形式并能够基于气体的热导率测量的原理被用作气体传感器。
摘要（英）：

A thermal flow sensor comprising at least one first suspended element (2) suspended relative to a support, said first suspended element (2) being made from an electrically conductive material, first polarisation means (6) of said suspended element (2) and first measuring means (8) for measuring the variation in electrical voltage at the terminals of the suspended element (2), said first suspended element (2) being formed by a nanowire and said first polarisation means (6) being formed from an alternating current source of which the intensity heats the first suspended element (2) by Joule effect. Said sensor can be in the form of a plurality of suspended nanowires and can be used as a gas sensor based on the principle of the thermal conductivity measurement of said gas.

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