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发明授权
CN105632895B 一种减少化学清洗工艺中球形颗粒缺陷的方法 有权

一种减少化学清洗工艺中球形颗粒缺陷的方法
摘要：
本发明公开了一种减少化学清洗工艺中球形颗粒缺陷的方法，应用于采用65纳米铜互连后道清洗及化学处理设备对硅片进行化学清洗，通过在新化学药液更新进入药液罐后的首次化学清洗工艺之前，先对工艺自循环管路和非工艺自循环管路分别通入经加热及过滤的新化学药液进行一定时间的循环处理，使管路中产生的球状颗粒随着新化学药液的充分循环而逐渐减少，之后，再进行化学清洗工艺，即可有效降低工艺后球状颗粒的增加值。
摘要（英）：

The invention discloses a method for reducing spherical particle defects in a chemical cleaning technology. Chemical cleaning is carried out on a silicon wafer by 65-nano copper interconnection back cleaning and chemical processing equipment; before a new chemical liquid medicine updates the first chemical cleaning technology after entering a liquid medicine tank, the heated and filtered new chemical liquid medicine is introduced into a technological self-circulating pipe and a non-technological self-circulating pipe for circular processing for a certain period of time respectively; spherical particles generated in the pipes are gradually reduced along with full circulation of the new chemical liquid medicine; and then the chemical cleaning technology is carried out, so that the added value of the spherical particles after the technology can be effectively lowered.

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