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发明公开
CN106783493A 一种真空气氛处理装置、样品观测系统及方法 有权

一种真空气氛处理装置、样品观测系统及方法
摘要：
本发明公开了一种真空气氛处理装置，所述装置的顶部与外部的粒子束产生装置连接，其特征在于，所述装置包括：底部与外部的待测样品或承载所述待测样品的平台接触的吸盘、与外部的供气系统连接的第一气体控制器、与外部的抽气系统连接的第二气体控制器；其中，所述装置的顶部设置有窗口，所述窗口用于使外部的粒子束进入所述装置；所述第一气体控制器，用于连接所述供气系统和所述吸盘；所述第二气体控制器，用于连接所述抽气系统和所述吸盘。本发明还公开了一种样品观测系统及方法。
摘要（英）：

The invention discloses a vacuum atmosphere treatment device. The top of the device is in device connection with external particle beams, and the vacuum atmosphere treatment device is characterized by comprising a sucking disc of which the bottom is in contact with an external sample to be tested or a platform which loads the sample to be tested, a first gas controller connected with an external gas supply system, and a second gas controller connected with an external gas extraction system, wherein a window is arranged at the top of the device, and the window is used to bring the external particle beams into the device; the first gas controller is used to connect with the gas supply system and the sucking disc; and the second gas controller is used to connect with the gas extraction system and the sucking disc. The invention also discloses a sample observation system and method.

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