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发明授权
CN106783493B 一种真空气氛处理装置、样品观测系统及方法 有权

一种真空气氛处理装置、样品观测系统及方法
摘要：
本发明公开了一种真空气氛处理装置，所述装置的顶部与外部的粒子束产生装置连接，其特征在于，所述装置包括：底部与外部的待测样品或承载所述待测样品的平台接触的吸盘、与外部的供气系统连接的第一气体控制器、与外部的抽气系统连接的第二气体控制器；其中，所述装置的顶部设置有窗口，所述窗口用于使外部的粒子束进入所述装置；所述第一气体控制器，用于连接所述供气系统和所述吸盘；所述第二气体控制器，用于连接所述抽气系统和所述吸盘。本发明还公开了一种样品观测系统及方法。
摘要（英）：

A vacuum condition processing apparatus(100) is provided, the top of which is connected to an external charged particle beam generating device(200), and the apparatus includes: a suction cup(101) in contact with the specimen(113) to be observed or the stage(601) holding the specimen, a first gas controlling device(103) connected to an external gas supplying system(102), and a second gas controlling device(112) connected to an external pumping system(104); a window(111) is deployed at the top of the apparatus, through which the particle beam can go into the apparatus; the first gas controlling device is arranged to connect the gas supplying system and the suction cup; the second gas controlling device is arranged to connect the gas pumping system and the suction cup. A specimen observation system and method are provided.

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