The invention relates to an over-temperature protection device and method which are suitable for MOCVD equipment. The over-temperature protection device comprises an information collecting device, a signal conversion device, a real-time controller and an interlock protection circuit, the information collecting device collects operating parameter information of the MOCVD equipment, and the signal conversion device is connected with the information collecting device and conducts signal conversion on the collected operating parameter information of the MOCVD equipment; the real-time controller isconnected with the signal conversion device and used for receiving the converted operating parameter information of the MOCVD equipment and detecting whether the operating parameter information meetsthe preset operating condition of the MOCVD equipment or not; and the interlock protection circuit is connected with the real-time controller, and when the real-time controller detects that the current operating parameter of the MOCVD equipment does not meet the preset operating condition, the interlock protection circuit is triggered to initiate emergency protection measures. According to the over-temperature protection device, the operating parameter information of the MOCVD equipment is collected to conduct accurate prediction and judgment on the possible accidents such as temperature uncontrollability, and the effective emergency protection measures are initiated in time to ensure that the equipment is not damaged and avoid casualties.