它可以调整在半导体晶片和相对于光电测量的掩模和感测系统和所述两个物体在半导体结构的制造的分步投影光刻zueiander。 这是可能都根据其特征beeinflusten光流和通过其结构的高精确度，另外，下任选使用当前可用的不同对准标记的两个对象的最快的可能的调整。 通过光学成像系统（10，11，12），8）的两个物体（1，2）中的光电测量和扫描对称有关此系统的固定轴线的扫描平面产生的对准标记4，5，7的图像的装置。 所述的图像信号获得两个，通过静止在固定轴中心Web图像部分被分开使用通过电子或机械装置产生。 这产生了双光束方法。 图像扫描是由电视摄像机管或柔性槽的载体，其中，所述两个图像部分通过通道交替地切换该图像信号生成中使用的装置进行。 算术单元处理的图像信号，并产生控制信号，用于致动器用于调节所述两个物体（1，2）。

It can be adjusted to a semiconductor wafer and a mask over a photoelectric measuring and scanning system and the two objects zueiander in the gradual projection lithography for the fabrication of semiconductor structures. It is a highly accurate, while the fastest possible adjustment of the two objects under optional use of the currently available different alignment allows both to the characterized beeinflusten light flows and by their structure. By means of an optical imaging system (10, 11, 12) an image of the alignment marks 4, 5, 7, 8) of the two objects (1,2) in the scanning plane of a photoelectric measuring and scanning is generated symmetrically with respect to a fixed axis of this system. For image signal obtaining two, separated by a lying on the stationary shaft center web image sections are used which are produced by electronic or mechanical means. This results in a double-jet method. The image scanned by means of a television camera tube or flexible slot carrier, the two image sections are used by channel switching alternately the image signal generation. An arithmetic unit processes the image signals and generates control signals for actuators for adjusting the two objects (1, 2).