发明公开
EP0407086A2 Melamine-containing photoresists of improved sensitivity
失效
Melamin enthaltendeFotowiderständemit hoher Empfindlichkeit。
- 专利标题： Melamine-containing photoresists of improved sensitivity
- 专利标题（中）： Melamin enthaltendeFotowiderständemit hoher Empfindlichkeit。
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申请号： EP90307008.4申请日： 1990-06-27
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公开(公告)号： EP0407086A2公开(公告)日： 1991-01-09
- 发明人: Graziano, Karen Ann , Bogan, Leonard Edward, Jr. , Olsen, Robert James , Anderson McIlnay, Susan Elizabeth
- 申请人： ROHM AND HAAS COMPANY
- 申请人地址： Independence Mall West Philadelphia Pennsylvania 19105 US
- 专利权人： ROHM AND HAAS COMPANY
- 当前专利权人： ROHM AND HAAS COMPANY
- 当前专利权人地址： Independence Mall West Philadelphia Pennsylvania 19105 US
- 代理机构： Tanner, James Percival
- 优先权： US376713 19890707
- 主分类号： G03F7/038
- IPC分类号： G03F7/038 ; G03F7/004
摘要：
Melamine-containing photoresists are disclosed that display increased sensitivity, measured as lithographic potential, when compared to known photoresists that contain melamine resin as a crosslinker. The melamine resin in these photoresists contains a higher percent, by weight, of monomeric hexamethoxymethylmelamine than in known resists.
公开/授权文献
- EP0407086B1 Melamine-containing photoresists of improved sensitivity 公开/授权日：1997-02-26
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