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公开(公告)号：EP0407086B1
公开(公告)日：1997-02-26
申请号：EP90307008.4
申请日：1990-06-27
发明人： Graziano, Karen Ann , Bogan, Leonard Edward, Jr. , Olsen, Robert James , Anderson McIlnay, Susan Elizabeth
CPC分类号： G03F7/004 , G03F7/038 , Y10S430/106
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2.发明公开Melamine-containing photoresists of improved sensitivity 失效Melamin enthaltendeFotowiderständemit hoher Empfindlichkeit。
公开(公告)号：EP0407086A2
公开(公告)日：1991-01-09
申请号：EP90307008.4
申请日：1990-06-27
发明人： Graziano, Karen Ann , Bogan, Leonard Edward, Jr. , Olsen, Robert James , Anderson McIlnay, Susan Elizabeth
CPC分类号： G03F7/004 , G03F7/038 , Y10S430/106
摘要： Melamine-containing photoresists are disclosed that display increased sensitivity, measured as lithographic potential, when compared to known photoresists that contain melamine resin as a crosslinker. The melamine resin in these photoresists contains a higher percent, by weight, of monomeric hexamethoxymethylmelamine than in known resists.
摘要翻译： 当与已知的含有三聚氰胺树脂作为交联剂的光致抗蚀剂相比时，公开了含有蜜胺的光致抗蚀剂，其显示出增加的灵敏度，作为平版印刷电位测量。 这些光致抗蚀剂中的三聚氰胺树脂含有比已知抗蚀剂高的单体六甲氧基甲基三聚氰胺百分比。
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公开(公告)号：EP0407086A3
公开(公告)日：1992-01-15
申请号：EP90307008.4
申请日：1990-06-27
发明人： Graziano, Karen Ann , Bogan, Leonard Edward, Jr. , Olsen, Robert James , Anderson McIlnay, Susan Elizabeth
CPC分类号： G03F7/004 , G03F7/038 , Y10S430/106
摘要： Melamine-containing photoresists are disclosed that display increased sensitivity, measured as lithographic potential, when compared to known photoresists that contain melamine resin as a crosslinker. The melamine resin in these photoresists contains a higher percent, by weight, of monomeric hexamethoxymethylmelamine than in known resists.
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