发明授权
EP0942331B1 ANTIREFLECTION OR LIGHT-ABSORBING COATING COMPOSITION AND POLYMER THEREFOR
有权
组成反REFLEX涂层或吸光涂层和其聚合物
- 专利标题: ANTIREFLECTION OR LIGHT-ABSORBING COATING COMPOSITION AND POLYMER THEREFOR
- 专利标题(中): 组成反REFLEX涂层或吸光涂层和其聚合物
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申请号: EP98940556.8申请日: 1998-08-26
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公开(公告)号: EP0942331B1公开(公告)日: 2003-11-05
- 发明人: PADMANABAN, Munirathna, Clariant Corporation , KANG, Wen-Bing, Clariant (Japan) K.K. , PAWLOWSKI, Georg, Clariant (Japan) K.K. , KIMURA, Ken, Clariant (Japan) K.K. , TANAKA, Hatsuyuki, Clariant (Japan) K.K.
- 申请人: Clariant Finance (BVI) Limited
- 申请人地址: Citco Building, Wickhams Cay Road Town, Tortola VG
- 专利权人: Clariant Finance (BVI) Limited
- 当前专利权人: Clariant Finance (BVI) Limited
- 当前专利权人地址: Citco Building, Wickhams Cay Road Town, Tortola VG
- 代理机构: Hütter, Klaus, Dr.
- 优先权: JP27565297 19971008
- 国际公布: WO99018478 19990415
- 主分类号: G03F7/11
- IPC分类号: G03F7/11 ; C09D5/00 ; C08F220/10 ; C08F220/34 ; C08F220/54 ; C08F246/00 ; C08F212/36 ; C08F20/34 ; C08F20/36 ; C08F20/16 ; C08F220/16 ; C08F20/18 ; C08F220/18 ; C08F220/36 ; G03F7/09
摘要:
An antireflection or light-absorbing coating composition which exhibits good light absorption in the wavelength range of from 100 to 450 nm, is free from footing and intermixing, and possesses excellent storage stability and step coverage; and a novel copolymer therefor. The copolymer is an acrylic or methacrylic copolymer comprising a main chain having carboxyl groups bonded to the carbon atoms thereof and, reaction-bonded thereto, at least (1) repeating units each comprising an aminated or hydroxylated organic chromophore which absorbs light in the wavelength range of from 100 to 450 nm directly or through and -R1NHCXY- group (wherein R1 represents an alkylene group; X represents O or S; Y represents O or an NR6 group; and R6 represents H or a substituted or unsubstituted, straight-chain or cyclic alkyl or phenylene group), and (2) repeating units each comprising an alkyl group having a double bond or an epoxy group. A resist image having high resolution can be formed by coating a wafer with the above composition to form a bottom antireflection coating, coating the surface of the coating with a photoresist, and then conducting exposure to far ultraviolet light and development.
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