发明公开
- 专利标题： PRESSURE SENSOR AND A METHOD OF MANUFACTURING THE SAME
- 专利标题（中）： 压力传感器和相同的方法
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申请号： EP98954712.0申请日： 1998-11-17
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公开(公告)号： EP0997721A1公开(公告)日： 2000-05-03
- 发明人: ESASHI, Masayoshi , HAGA, Yoichi Room 1003 , KATSUMATA, Takashi
- 申请人： ESASHI, Masayoshi
- 申请人地址： 11-9, Yagiyama-minami 1-chome, Taihaku-ku Sendai-shi, Miyagi 982-0807 JP
- 专利权人： ESASHI, Masayoshi
- 当前专利权人： ESASHI, Masayoshi
- 当前专利权人地址： 11-9, Yagiyama-minami 1-chome, Taihaku-ku Sendai-shi, Miyagi 982-0807 JP
- 代理机构： Smith, Peter James
- 优先权： JP13198798 19980514
- 国际公布： WO9958944 19991118
- 主分类号： G01L9/00
- IPC分类号： G01L9/00
摘要：
A reflective type movable diaphragm unit 2 is formed on a groove 26-carrying silicon substrate 3, and a bonding agent layer serving also as a spacer 24 is provided around the diaphragm unit, this spacer 24 being bonded to a half mirror layer 11 of an optical fiber 1 with a cross-sectionally semicircular diaphragm portion 25 further provided on the diaphragm unit 2, whereby a pressure sensor is formed.
公开/授权文献
- EP0997721B1 PRESSURE SENSOR AND A METHOD OF MANUFACTURING THE SAME 公开/授权日：2013-04-10
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