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    PRESSURE SENSOR AND A METHOD OF MANUFACTURING THE SAME
    2.
    发明公开
    PRESSURE SENSOR AND A METHOD OF MANUFACTURING THE SAME 有权
    DRUCKSENSOR UND HERSTELLUNGSVERFAHREN DESSELBEN

    公开(公告)号：EP0997721A4

    公开(公告)日：2002-11-05

    申请号：EP98954712

    申请日：1998-11-17

    申请人： ESASHI MASAYOSHI

    发明人： ESASHI MASAYOSHI ,  HAGA YOICHI ,  KATSUMATA TAKASHI

    IPC分类号： G01L9/00

    CPC分类号： G01L9/0077

    摘要： A pressure sensor is manufactured by forming a reflection movable diaphragm unit (2) on a silicon substrate (3) having a groove (26), forming an adhesive layer also serving as a spacer (24) around the unit, bonding the spacer (24) to a half mirror layer (11) of an optical fiber (1), and providing a diaphragm section (25) semicircular in cross section to the diaphragm unit (2).

    摘要翻译： 反射型可动光阑单元2形成在承载硅基板3的槽26上，并且在光阑单元周围设置也用作间隔物24的接合剂层，该隔离物24被接合到半透明层11 进一步设置在隔膜单元2上的具有横截面半圆形隔膜部分25的光纤1，由此形成压力传感器。

    VIBRATING TYPE PRESSURE SENSOR
    5.
    发明授权
    VIBRATING TYPE PRESSURE SENSOR 有权
    振动型压力传感器

    公开(公告)号：EP1471340B1

    公开(公告)日：2008-09-24

    申请号：EP03701810.8

    申请日：2003-01-20

    申请人： Fujikin Incorporated ,  ESASHI, Masayoshi

    发明人： ESASHI, Masayoshi ,  HIRATA, Kaoru, c/o Fujikin Incorporated

    IPC分类号： G01L9/00

    CPC分类号： G01L9/0017

    摘要： A high-sensitive and high-accuracy vibrating type pressure sensor 1 allowing a corrosive gas pressure to be directly applied thereto, having a heat resistance, and having no room for mixing of noise into a vibrator, comprising a stainless steel pressure receiving diaphragm 4 for receiving a fluid pressure P on a rear surface side, the vibrator 12 formed on the front surface side of the pressure receiving diaphragm 4, a wall body 8 disposed so as to surround the periphery of the vibrator 12, and a permeable part 20 for light transmission for changing an internal space in which the vibrator 12 is present into a vacuum chamber 10 by closing an opening part 8a in the wall body 8, whereby, since the diaphragm 4 is formed of the stainless steel with corrosion resistance, the sensor can also be applied to corrosive fluid, since circuit wiring is eliminated from the vibrator 12 and the vibrator is isolatedly disposed in the vacuum chamber 10, mixing of electromagnetic noise can be eliminated, and since the resonance frequency fn of the vibrator 12 is performed by optical measurement in the state of non-contact, extremely high-sensitive and high-accuracy detection can be performed. A forced vibration means 57 can also be operated by piezo driving and electrostatic driving from the outside without generating noise.

    Gyroscope and input device
    7.
    发明公开
    Gyroscope and input device 有权
    离心和输入装置

    公开(公告)号：EP1099930A3

    公开(公告)日：2004-01-07

    申请号：EP00309009.9

    申请日：2000-10-13

    申请人： ALPS ELECTRIC CO., LTD. ,  ESASHI, Masayoshi

    发明人： Abe, Munemitsu, c/o Alps Electric Co., Ltd. ,  Shinohara, Eiji, c/o Alps Electric Co., Ltd. ,  Esashi, Masayoshi

    IPC分类号： G01C19/56 ,  G01P9/04

    CPC分类号： G01C19/5628 ,  G01C19/5621

    摘要： A gyroscope of the present invention includes a tuning fork having three legs and a support portion, an upper glass substrate and a lower glass substrate, between which the tuning fork is interposed, driving electrodes respectively arranged on the two glass substrates so that the driving electrodes are opposed to a base portion of each leg, six movable protruded detection electrodes formed on each of the top surface of and the underside of an end portion of each leg, and six stationary detection electrodes on each of the upper and lower glass substrates so that the six stationary detection electrodes are respectively opposed to the six movable detection electrodes. The gyroscope of the present invention thus features compact design, high sensitivity, and low required driving voltage.

    Gyroscope and input apparatus using the same
    8.
    发明公开
    Gyroscope and input apparatus using the same 有权
    陀螺仪和用于输入装置

    公开(公告)号：EP1083404A3

    公开(公告)日：2003-08-13

    申请号：EP00307259.2

    申请日：2000-08-23

    申请人： ALPS ELECTRIC CO., LTD. ,  ESASHI, Masayoshi

    发明人： Esashi, Masayoshi ,  Abe, Munemitsu, c/o Alps Electric Co., Ltd ,  Shinohara, Eiji, c/o Alps Electric Co., Ltd

    IPC分类号： G01C19/56

    CPC分类号： G01C19/5607

    摘要： A gyroscope of the invention is provided with a tuning fork (2) having three legs (9) and a support (10), a top side glass substrate (7) and a bottom side glass substrate (8) between which the tuning fork is interposed, driving movable electrodes (3) disposed on the top surface of each leg, driving fixed electrodes (4) disposed on the bottom surface of the top side glass substrate so as to face to the driving movable electrodes, six detection movable electrodes (5) connected to each other in parallel disposed on the top surface of the free end of each leg, and six detection fixed electrodes (6) connected to each other in parallel disposed on the bottom surface of the top side glass substrate so as to face to the detection movable electrodes.

    Gyroscope and input apparatus using the same
    9.
    发明公开
    Gyroscope and input apparatus using the same 有权
    KreiselgerätundEingabegerätdafür

    公开(公告)号：EP1083404A2

    公开(公告)日：2001-03-14

    申请号：EP00307259.2

    申请日：2000-08-23

    申请人： ALPS ELECTRIC CO., LTD. ,  ESASHI, Masayoshi

    发明人： Esashi, Masayoshi ,  Abe, Munemitsu, c/o Alps Electric Co., Ltd ,  Shinohara, Eiji, c/o Alps Electric Co., Ltd

    IPC分类号： G01C19/56

    CPC分类号： G01C19/5607

    摘要： A gyroscope of the invention is provided with a tuning fork (2) having three legs (9) and a support (10), a top side glass substrate (7) and a bottom side glass substrate (8) between which the tuning fork is interposed, driving movable electrodes (3) disposed on the top surface of each leg, driving fixed electrodes (4) disposed on the bottom surface of the top side glass substrate so as to face to the driving movable electrodes, six detection movable electrodes (5) connected to each other in parallel disposed on the top surface of the free end of each leg, and six detection fixed electrodes (6) connected to each other in parallel disposed on the bottom surface of the top side glass substrate so as to face to the detection movable electrodes.

    摘要翻译： 本发明的陀螺仪设有具有三个腿部（9）和支撑件（10）的音叉（2），顶侧玻璃基底（7）和底侧玻璃基底（8），音叉 驱动设置在每个支腿顶表面上的驱动可动电极（3），驱动设置在顶侧玻璃基板的底表面上的固定电极（4）以面对驱动可动电极，六个检测可移动电极（5 ）并列配置在每个支腿的自由端的上表面上的六个检测固定电极（6），并且设置在顶侧玻璃基板的底面上并联连接的六个检测固定电极（6） 检测可动电极。