发明公开
- 专利标题: An apparatus and a method for processing a fluid meniscus
- 专利标题(中): 一种处理流体弯月面的设备和方法
-
申请号: EP05251949.3申请日: 2005-03-30
-
公开(公告)号: EP1601006A3公开(公告)日: 2005-12-14
- 发明人: Woods, Carl , Parks, John , Smith, Michael G. R.
- 申请人: LAM RESEARCH CORPORATION
- 申请人地址: 4650 Cushing Parkway Fremont, CA 94538 US
- 专利权人: LAM RESEARCH CORPORATION
- 当前专利权人: LAM RESEARCH CORPORATION
- 当前专利权人地址: 4650 Cushing Parkway Fremont, CA 94538 US
- 代理机构: Thomson, Paul Anthony
- 优先权: US817355 20040401
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; B08B3/00 ; B08B3/04 ; C23C18/16 ; C25D7/12 ; C25D5/22 ; B05D1/00
摘要:
An apparatus for generating a fluid meniscus to be formed on a surface of a substrate is provided including a housing where the housing includes a housing surface to be placed proximate to a substrate surface of the substrate. The housing further includes a process configuration receiving region that is surrounded by the housing surface. The apparatus also includes a process configuration insert which has an insert surface where the process configuration insert is defined to fit within the process configuration receiving region of the housing such that the insert surface and the housing surface define a proximity face that can be placed proximate to the substrate surface of the substrate.
公开/授权文献
- EP1601006B1 An apparatus and a method for processing a fluid meniscus 公开/授权日:2007-10-10
信息查询
IPC分类: