发明公开
EP1968094A2 Non-axisymmetric charged-particle beam system
审中-公开
Nicht-achsensymmetrisches系统zu Erzeugung eines Strahls geladener Teilchen
- 专利标题： Non-axisymmetric charged-particle beam system
- 专利标题（中）： Nicht-achsensymmetrisches系统zu Erzeugung eines Strahls geladener Teilchen
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申请号： EP08157418.8申请日： 2005-06-06
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公开(公告)号： EP1968094A2公开(公告)日： 2008-09-10
- 发明人: Bhatt, Rhonak, J , Chen, Chiping , Zhou, Jing
- 申请人： Massachusetts Institute of Technology
- 申请人地址： 77 Massachusetts Avenue Cambridge MA 2139 US
- 专利权人： Massachusetts Institute of Technology
- 当前专利权人： Massachusetts Institute of Technology
- 当前专利权人地址： 77 Massachusetts Avenue Cambridge MA 2139 US
- 代理机构： Valea AB
- 优先权： US577132P 20040604
- 主分类号： H01J3/02
- IPC分类号： H01J3/02 ; H01J3/20 ; H01J27/02 ; H05H7/00
摘要：
The charged-particle beam system includes a non-axisymmetric diode forms a non-axisymmetric beam having an elliptic cross-section. A focusing element utilizes a magnetic field for focusing and transporting the non-axisymmetric beam, wherein the non-axisymmetric beam is approximately matched with the channel of the focusing element.
公开/授权文献
- EP1968094A3 Non-axisymmetric charged-particle beam system 公开/授权日：2010-01-06
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