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公开(公告)号：EP0251381A3
公开(公告)日：1989-02-08
申请号：EP87201153.1
申请日：1987-06-17
CPC分类号： H01J37/14
摘要： A magnetic lens system is provided for a beam of charged particles (1), comprising a pair of ring-shaped permanent magnets (9, 10) through which the beam passes, the axes of the rings lying coaxially along the beam direction, and the two rings being axially separated and axially oppositely magnetised. A pair of separated conducting focus coils (20, 21) are provided one for each ring, the axes of the focus coils lying coaxially along the beam direction, each focus coil lying within its associated ring, and the focus coils being connected in series opposition to carry an adjustable direct electric current for fine focusing of the beam by the lens without rotation of the focused beam. The lens may provide the fast fine focus adjustment needed to compensate for space charge defocussing produced by changes in beam current.
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2.发明授权ION BEAM FAST PARALLEL SCANNING HAVING DIPOLE MAGNETIC LENS WITH NONUNIFORM FIELD 失效离子束快速并行扫描具有非线性场的双极磁性透镜
公开(公告)号：EP0278969B1
公开(公告)日：1992-10-14
申请号：EP87905709.9
申请日：1987-08-24
发明人： ENGE, Harald, Anton
CPC分类号： H01J37/147
摘要： An ion source provides ions that pass through an analyzing magnet, image slit, and magnetic quadrupole lenses before entering a beam deflector. The deflected ion beam enters a magnetic field established by a dipole magnetic lens of rectangular cross section in planes parallel to the beam plane including the scanned ion beam, and having a variable width gap in a plane perpendicular to the beam plane that provides a parallel scanned ion beam. The parallel scanned ion beam enters a slot-shaped acceleration column and then scans a target.
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公开(公告)号：EP0251381A2
公开(公告)日：1988-01-07
申请号：EP87201153.1
申请日：1987-06-17
CPC分类号： H01J37/14
摘要： A magnetic lens system is provided for a beam of charged particles (1), comprising a pair of ring-shaped permanent magnets (9, 10) through which the beam passes, the axes of the rings lying coaxially along the beam direction, and the two rings being axially separated and axially oppositely magnetised. A pair of separated conducting focus coils (20, 21) are provided one for each ring, the axes of the focus coils lying coaxially along the beam direction, each focus coil lying within its associated ring, and the focus coils being connected in series opposition to carry an adjustable direct electric current for fine focusing of the beam by the lens without rotation of the focused beam. The lens may provide the fast fine focus adjustment needed to compensate for space charge defocussing produced by changes in beam current.
摘要翻译： 提供一种磁性透镜系统，用于带电粒子束（1），其包括一对环形永磁体（9,10），光束通过该圆形永久磁铁（9,10），所述环的轴线沿着光束方向同轴，并且 两个环轴向分离并且轴向相对地磁化。 一对分离的导电聚焦线圈（20,21）为每个环设置一个，聚焦线圈的轴线沿着光束方向同轴地布置，每个焦点线圈位于其相关联的环内，并且聚焦线圈串联连接 携带可调节的直流电流，用于通过透镜精确地聚焦光束而不旋转聚焦光束。 透镜可以提供所需的快速精细调焦以补偿由束电流变化产生的空间电荷抖动。
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公开(公告)号：EP2681755A2
公开(公告)日：2014-01-08
申请号：EP12754828.7
申请日：2012-03-02
发明人： WELKIE, David G.
CPC分类号： H01J49/061 , H01J37/12 , H01J37/1472 , H01J49/06 , H01J49/063 , H01J49/22 , H01J49/26
摘要： A system includes an electrostatic lens in a path between a charged particle source and a detector. The electrostatic lens includes: a first electrode having a first aperture in the path aligned with a first axis; a second electrode in the path between the first electrode and the detector, having a second aperture in the path and aligned with a second axis that is parallel to the first axis and displaced from the first axis along a first direction; a third electrode in the path between the first electrode and the second electrode; and a potential generator coupled to the electrodes. During operation, the potential generator applies potentials to the first, second and third electrodes so that the electrostatic lens directs a beam of charged particles from the source propagating along the first axis to propagate along the second axis.
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5.发明公开Non-axisymmetric charged-particle beam system 审中-公开Nicht-achsensymmetrisches系统zu Erzeugung eines Strahls geladener Teilchen
公开(公告)号：EP1968094A2
公开(公告)日：2008-09-10
申请号：EP08157418.8
申请日：2005-06-06
发明人： Bhatt, Rhonak, J , Chen, Chiping , Zhou, Jing
摘要： The charged-particle beam system includes a non-axisymmetric diode forms a non-axisymmetric beam having an elliptic cross-section. A focusing element utilizes a magnetic field for focusing and transporting the non-axisymmetric beam, wherein the non-axisymmetric beam is approximately matched with the channel of the focusing element.
摘要翻译： 带电粒子束系统包括形成具有椭圆截面的非轴对称光束（8）的非轴对称二极管（2）。 聚焦元件利用磁场来聚焦和传送非轴对称光束，其中非轴对称光束与聚焦元件的通道大致匹配。
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6.发明公开ION BEAM FAST PARALLEL SCANNING HAVING DIPOLE MAGNETIC LENS WITH NONUNIFORM FIELD. 失效WITH离子束FAST并行采样与具有混合场的双极磁透镜。
公开(公告)号：EP0278969A4
公开(公告)日：1988-12-12
申请号：EP87905709
申请日：1987-08-24
发明人： ENGE HARALD ANTON
IPC分类号： H01J37/141 , G21K1/00 , H01J3/14 , H01J3/20 , H01J37/00 , H01J37/147 , H01J37/317
CPC分类号： H01J37/147
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公开(公告)号：EP0129111A1
公开(公告)日：1984-12-27
申请号：EP84106084.1
申请日：1984-05-28
摘要： Die Erfindung betrifft eine magnetische Multipolanordnung n-ter Ordnung zur Beeinflussung der Flugbahn von geladenen Teilchen. Um ohne gesondert herzustellende Bauteile auszukommen, wird vorgeschlagen, daß als Multipolanordnung der Ständer (1) einer mehrphasigen Wechselsstrommaschine vorgesehen ist, deren Ständerwicklung von einer Spannungsquelle derart gespeist wird, daß das Produkt aus Strom und Windungszahl (Amperewindungszahl) in einer unter dem Azimutwinkel H angeordneten Nut oder Nutgruppe proportional zu cos(nθ) ist, wobei n der Ordnungszahl der Multipolanordnung entspricht und die Faktoren a und b dem Verhältnis b/a, welches die Orientierung des Multipols relativ zu dem Azimutwinkel θ = 0 angibt, entnommen sind. Als Multipolanordnung kann auch ein durch Dauermagnete erregter Ständer einer Gleichstrommaschine vorgesehen werden.
摘要翻译： 本发明涉及一种磁性的多n次来影响带电粒子的轨迹。 来管理，而无需单独制造的部件，所以建议为多极定子（1）提供了一种多相交流发电机，其定子绕组由使得电流和匝数（安培）的数目的乘积在一个方位角下布置θ的电压源激励 槽或槽组正比于cos（NΘ），其中n是相应的多极的序号，并且该因素a和b的比率b / a，它们是0表示相对于方位角θ=截取的多极的方向。 当多极由一个直流电机的永磁体定子也激发可以被提供。
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