公开(公告)号：EP1968094A3

公开(公告)日：2010-01-06

申请号：EP08157418.8

申请日：2005-06-06

申请人： Massachusetts Institute of Technology

发明人： Bhatt, Rhonak, J ,  Chen, Chiping ,  Zhou, Jing

IPC分类号： H01J3/12 ,  H01J3/14

CPC分类号： H01J27/02 ,  G21K1/093 ,  H01J3/02 ,  H01J3/12 ,  H01J3/20 ,  H01J29/64

摘要： The charged-particle beam system includes a non-axisymmetric diode (2) that forms a non-axisymmetric beam (8) having an elliptic cross-section. A focusing element utilizes a magnetic field for focusing and transporting the non-axisymmetric beam, wherein the non-axisymmetric beam is approximately matched with the channel of the focusing element.

公开(公告)号：EP1968094A2

公开(公告)日：2008-09-10

申请号：EP08157418.8

申请日：2005-06-06

申请人： Massachusetts Institute of Technology

发明人： Bhatt, Rhonak, J ,  Chen, Chiping ,  Zhou, Jing

IPC分类号： H01J3/02 ,  H01J3/20 ,  H01J27/02 ,  H05H7/00

CPC分类号： H01J27/02 ,  G21K1/093 ,  H01J3/02 ,  H01J3/12 ,  H01J3/20 ,  H01J29/64

摘要： The charged-particle beam system includes a non-axisymmetric diode forms a non-axisymmetric beam having an elliptic cross-section. A focusing element utilizes a magnetic field for focusing and transporting the non-axisymmetric beam, wherein the non-axisymmetric beam is approximately matched with the channel of the focusing element.

摘要翻译： 带电粒子束系统包括形成具有椭圆截面的非轴对称光束（8）的非轴对称二极管（2）。 聚焦元件利用磁场来聚焦和传送非轴对称光束，其中非轴对称光束与聚焦元件的通道大致匹配。