发明公开
- 专利标题： SYSTEMS FOR PROVIDING ILLUMINATION IN OPTICAL METROLOGY
- 专利标题（中）： 系统，用于光学检测提供照明
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申请号： EP14753960.5申请日： 2014-02-21
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公开(公告)号： EP2959503A1公开(公告)日： 2015-12-30
- 发明人: BRADY, Gregory , SHCHEGROV, Andrei V. , ROTTER, Lawrence D. , SHAUGHNESSY, Derrick , SHCEMELININ, Anatoly , BEZEL, Ilya , ARAIN, Muzammil , VASILIEV, Anatoly , ALLEN, James , SHULEPOV, Oleg , HILL, Andrew , BACHAR, Ohad , MARKOWITZ, Moshe , ISH-SHALOM, Yaron , SELA, Ilan , MANASSEN, Amnon , SVIZHER, Alexander , KHOKHLOV, Maxim , ABRAMOV, Avi , TSIBULEVSKY, Oleg , KANDEL, Daniel , GHINOVKER, Mark
- 申请人： Kla-Tencor Corporation
- 申请人地址： Legal Department One Technology Drive Milpitas, California 95035 US
- 专利权人： Kla-Tencor Corporation
- 当前专利权人： Kla-Tencor Corporation
- 当前专利权人地址： Legal Department One Technology Drive Milpitas, California 95035 US
- 代理机构： Keane, Paul Fachtna
- 优先权： US201313774025 20130222
- 国际公布： WO2014130829 20140828
- 主分类号： H01L21/66
- IPC分类号： H01L21/66
摘要：
The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.
公开/授权文献
- EP2959503B1 SYSTEMS FOR PROVIDING ILLUMINATION IN OPTICAL METROLOGY 公开/授权日：2018-05-30
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