公开(公告)号：EP2959503A1

公开(公告)日：2015-12-30

申请号：EP14753960.5

申请日：2014-02-21

申请人： Kla-Tencor Corporation

发明人： BRADY, Gregory ,  SHCHEGROV, Andrei V. ,  ROTTER, Lawrence D. ,  SHAUGHNESSY, Derrick ,  SHCEMELININ, Anatoly ,  BEZEL, Ilya ,  ARAIN, Muzammil ,  VASILIEV, Anatoly ,  ALLEN, James ,  SHULEPOV, Oleg ,  HILL, Andrew ,  BACHAR, Ohad ,  MARKOWITZ, Moshe ,  ISH-SHALOM, Yaron ,  SELA, Ilan ,  MANASSEN, Amnon ,  SVIZHER, Alexander ,  KHOKHLOV, Maxim ,  ABRAMOV, Avi ,  TSIBULEVSKY, Oleg ,  KANDEL, Daniel ,  GHINOVKER, Mark

IPC分类号： H01L21/66

CPC分类号： G01J3/10 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G01J3/0218 ,  G01J3/12 ,  G02B6/29332 ,  G02B6/29362 ,  G02B6/29388 ,  G02B6/29395 ,  G02B6/3508 ,  G02B6/353 ,  H01J65/04

摘要： The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

公开(公告)号：EP2959503B1

公开(公告)日：2018-05-30

申请号：EP14753960.5

申请日：2014-02-21

申请人： Kla-Tencor Corporation

发明人： BRADY, Gregory ,  SHCHEGROV, Andrei V. ,  ROTTER, Lawrence D. ,  SHAUGHNESSY, Derrick ,  SHCEMELININ, Anatoly ,  BEZEL, Ilya ,  ARAIN, Muzammil ,  VASILIEV, Anatoly ,  ALLEN, James ,  SHULEPOV, Oleg ,  HILL, Andrew ,  BACHAR, Ohad ,  MARKOWITZ, Moshe ,  ISH-SHALOM, Yaron ,  SELA, Ilan ,  MANASSEN, Amnon ,  SVIZHER, Alexander ,  KHOKHLOV, Maxim ,  ABRAMOV, Avi ,  TSIBULEVSKY, Oleg ,  KANDEL, Daniel ,  GHINOVKER, Mark

IPC分类号： G01J3/10 ,  G01J3/12 ,  H01J65/04 ,  G01J3/02 ,  G02B6/35 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G02B6/293

CPC分类号： G01J3/10 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G01J3/0218 ,  G01J3/12 ,  G02B6/29332 ,  G02B6/29362 ,  G02B6/29388 ,  G02B6/29395 ,  G02B6/3508 ,  G02B6/353 ,  H01J65/04

摘要： The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.