公开(公告)号：EP2865003A1

公开(公告)日：2015-04-29

申请号：EP13808673.1

申请日：2013-06-25

申请人： Kla-Tencor Corporation

发明人： MANASSEN, Amnon ,  HILL, Andy ,  KANDEL, Daniel ,  SELA, Ilan ,  BACHAR, Ohad ,  BRINGOLTZ, Barak

IPC分类号： H01L21/66

CPC分类号： G01N21/55 ,  G01B11/00 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/06113 ,  G01N2201/104

摘要： Angle-resolved reflectometers and reflectometry methods are provided, which comprise a coherent light source, an optical system arranged to scan a test pattern using a spot of coherent light from the light source to yield realizations of the light distribution in the collected pupil, wherein the spot covers a part of the test pattern and the scanning is carried out optically or mechanically according to a scanning pattern, and a processing unit arranged to generate a composite image of the collected pupil distribution by combining the pupil images. Metrology systems and methods are provided, which reduce diffraction errors by estimating, quantitatively, a functional dependency of measurement parameters on aperture sizes and deriving, from identified diffraction components of the functional dependency which relate to the aperture sizes, correction terms for the measurement parameters with respect to the measurement conditions.

公开(公告)号：EP2474027B1

公开(公告)日：2020-01-15

申请号：EP10814430.4

申请日：2010-09-01

申请人： KLA-Tencor Corporation

发明人： KANDEL, Daniel ,  LEVINSKI, Vladimir ,  SVIZHER, Alexander ,  SELIGSON, Joel ,  HILL, Andrew ,  BACHAR, Ohad ,  MANASSEN, Amnon ,  CHUANG, Yung-Ho Alex ,  SELA, Ilan ,  MARKOWITZ, Moshe ,  NEGRI, Daria ,  ROTEM, Efraim

IPC分类号： G01N21/956

公开(公告)号：EP2959503A1

公开(公告)日：2015-12-30

申请号：EP14753960.5

申请日：2014-02-21

申请人： Kla-Tencor Corporation

发明人： BRADY, Gregory ,  SHCHEGROV, Andrei V. ,  ROTTER, Lawrence D. ,  SHAUGHNESSY, Derrick ,  SHCEMELININ, Anatoly ,  BEZEL, Ilya ,  ARAIN, Muzammil ,  VASILIEV, Anatoly ,  ALLEN, James ,  SHULEPOV, Oleg ,  HILL, Andrew ,  BACHAR, Ohad ,  MARKOWITZ, Moshe ,  ISH-SHALOM, Yaron ,  SELA, Ilan ,  MANASSEN, Amnon ,  SVIZHER, Alexander ,  KHOKHLOV, Maxim ,  ABRAMOV, Avi ,  TSIBULEVSKY, Oleg ,  KANDEL, Daniel ,  GHINOVKER, Mark

IPC分类号： H01L21/66

CPC分类号： G01J3/10 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G01J3/0218 ,  G01J3/12 ,  G02B6/29332 ,  G02B6/29362 ,  G02B6/29388 ,  G02B6/29395 ,  G02B6/3508 ,  G02B6/353 ,  H01J65/04

摘要： The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

公开(公告)号：EP2474027A2

公开(公告)日：2012-07-11

申请号：EP10814430.4

申请日：2010-09-01

申请人： KLA-Tencor Corporation

发明人： KANDEL, Daniel ,  LEVINSKI, Vladimir ,  SVIZHER, Alexander ,  SELIGSON, Joel ,  HILL, Andrew ,  BACHAR, Ohad ,  MANASSEN, Amnon ,  CHUANG, Yung-Ho Alex ,  SELA, Ilan ,  MARKOWITZ, Moshe ,  NEGRI, Daria ,  ROTEM, Efraim

IPC分类号： H01L21/66

CPC分类号： G01N21/47 ,  G01B11/02 ,  G01B11/0641 ,  G01B2210/56 ,  G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/4792 ,  G01N2201/06113 ,  G01N2201/105 ,  G03F7/70625 ,  G03F7/70633

摘要： Various metrology systems and methods are provided.

公开(公告)号：EP2959503B1

公开(公告)日：2018-05-30

申请号：EP14753960.5

申请日：2014-02-21

申请人： Kla-Tencor Corporation

发明人： BRADY, Gregory ,  SHCHEGROV, Andrei V. ,  ROTTER, Lawrence D. ,  SHAUGHNESSY, Derrick ,  SHCEMELININ, Anatoly ,  BEZEL, Ilya ,  ARAIN, Muzammil ,  VASILIEV, Anatoly ,  ALLEN, James ,  SHULEPOV, Oleg ,  HILL, Andrew ,  BACHAR, Ohad ,  MARKOWITZ, Moshe ,  ISH-SHALOM, Yaron ,  SELA, Ilan ,  MANASSEN, Amnon ,  SVIZHER, Alexander ,  KHOKHLOV, Maxim ,  ABRAMOV, Avi ,  TSIBULEVSKY, Oleg ,  KANDEL, Daniel ,  GHINOVKER, Mark

IPC分类号： G01J3/10 ,  G01J3/12 ,  H01J65/04 ,  G01J3/02 ,  G02B6/35 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G02B6/293

CPC分类号： G01J3/10 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G01J3/0218 ,  G01J3/12 ,  G02B6/29332 ,  G02B6/29362 ,  G02B6/29388 ,  G02B6/29395 ,  G02B6/3508 ,  G02B6/353 ,  H01J65/04

摘要： The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.