发明公开
- 专利标题: PLASMA CVD DEVICE
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申请号: EP15872645申请日: 2015-12-01
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公开(公告)号: EP3239351A4公开(公告)日: 2018-05-30
- 发明人: KAWAHARA HIROTOMO , MAESHIGE KAZUNOBU , AOMINE NOBUTAKA , HANEKAWA HIROSHI
- 申请人: ASAHI GLASS CO LTD
- 专利权人: ASAHI GLASS CO LTD
- 当前专利权人: ASAHI GLASS CO LTD
- 优先权: JP2014259378 2014-12-22
- 主分类号: C23C16/503
- IPC分类号: C23C16/503 ; C23C16/44 ; C23C16/458 ; C23C16/50 ; H01J37/32 ; H01L21/02 ; H01L21/31 ; H01L21/365 ; H05H1/46
摘要:
A plasma CVD apparatus includes a plasma source connected to an alternating current power supply or two or more alternating current power supplies, configured to generate plasma; and a magnet array configured by a plurality of magnets. The plasma source has an electrode group, which is configured by arranging n electrodes (n being a positive even integer), in an order of electrode numbers. Each of the electrodes of the electrode group is connected to the alternating current power supply. An exit of a flow channel for a precursor gas is formed between adjacent electrodes of the electrode group. The magnet array is arranged so that a north pole or a south pole of each of the magnets is facing the plasma source. In the magnet array, for at least one pair of adjacent two magnets, poles facing the plasma source are arranged to be the same.
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