- 专利标题： REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS
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申请号： EP20197510.9申请日： 2020-09-22
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公开(公告)号： EP3971938A1公开(公告)日： 2022-03-23
- 发明人: OTTEN, Christiaan , CRANS, Peter-Paul , SMITS, Marc , DEL TIN, Laura , TEUNISSEN, Christan , HUANG, Yang-Shan , STEENBRINK, Stijn, Wilem, Herman, Karel , HU, Xuerang , XI, Qingpo , LUO, Xinan , LIU, Xuedong
- 申请人： ASML Netherlands B.V.
- 申请人地址： NL 5500 AH Veldhoven P.O. Box 324
- 代理机构： ASML Netherlands B.V.
- 主分类号： H01J37/02
- IPC分类号： H01J37/02 ; H01J37/18
摘要：
Disclosed herein is a module for supporting a device configured to manipulate charged particle paths in a charged particle apparatus, the module comprising: a support arrangement configured to support the device, wherein the device is configured to manipulate a charged particle path within the charged particle apparatus; and a support positioning system configured to move the support arrangement within the module; wherein the module is arranged to be field replaceable in the charged particle apparatus.
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