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公开(公告)号：EP3971938A1
公开(公告)日：2022-03-23
申请号：EP20197510.9
申请日：2020-09-22
发明人： OTTEN, Christiaan , CRANS, Peter-Paul , SMITS, Marc , DEL TIN, Laura , TEUNISSEN, Christan , HUANG, Yang-Shan , STEENBRINK, Stijn, Wilem, Herman, Karel , HU, Xuerang , XI, Qingpo , LUO, Xinan , LIU, Xuedong
摘要： Disclosed herein is a module for supporting a device configured to manipulate charged particle paths in a charged particle apparatus, the module comprising: a support arrangement configured to support the device, wherein the device is configured to manipulate a charged particle path within the charged particle apparatus; and a support positioning system configured to move the support arrangement within the module; wherein the module is arranged to be field replaceable in the charged particle apparatus.
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公开(公告)号：EP4165675A1
公开(公告)日：2023-04-19
申请号：EP21729576.5
申请日：2021-06-03
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公开(公告)号：EP3488294A1
公开(公告)日：2019-05-29
申请号：EP17734065.0
申请日：2017-06-29
发明人： JEUNINK, Andre Bernardus , VAN BOKHOVEN, Laurentius Johannes Adrianus , VAN DER MEULEN, Stan Henricus , HUANG, Yang-Shan , LA TORRE, Federico , MOEST, Bearrach , KEIJ, Stefan Carolus Jacobus Antonius , VAN DEN BRINK, Enno , SCHOUTEN, Christine Henriette , TOLSMA, Hoite Pieter Theodoor
IPC分类号： G03F7/20
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5.发明公开
公开(公告)号：EP4094125A1
公开(公告)日：2022-11-30
申请号：EP20838574.0
申请日：2020-12-24
发明人： ALBRIGHT, Ronald, Peter , BAL, Kursat , BANINE, Vadim, Yevgenyevich , BRULS, Richard, Joseph , DE VRIES, Sjoerd, Frans , FRIJNS, Olav, Waldemar, Vladimir , HUANG, Yang-Shan , HUANG, Zhuangxiong , JACOBS, Johannes, Henricus, Wilhelmus , MOORS, Johannes, Hubertus, Josephina , NENCHEV, Georgi, Nenchev , NIKIPELOV, Andrey , RAASVELD, Thomas, Maarten , RANJAN, Manish , TE SLIGTE, Edwin , UMSTADTER, Karl, Robert , UZGÖREN, Eray , VAN DE KERKHOF, Marcus, Adrianus , YAGHOOBI, Parham
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